公开(公告)号：US20240114696A1

公开(公告)日：2024-04-04

申请号：US17957603

申请日：2022-09-30

Applicant: Intel Corporation

Inventor： Christopher Neumann ,  Cory Weinstein ,  Nazila Haratipour ,  Brian Doyle ,  Sou-Chi Chang ,  Tristan Tronic ,  Shriram Shivaraman ,  Uygar Avci

IPC: H01L27/11507 ,  H01L27/11514

CPC classification number: H01L27/11507 ,  H01L27/11514

Abstract: Multiple-ferroelectric capacitor structures in memory devices, including in integrated circuit devices, and techniques for forming the structures. Insulators separating individual outer plates in a ferroelectric capacitor array are supported between wider portions of a shared, inner plate. Wider portions of an inner plate may be formed in lateral recesses between insulating layers. Ferroelectric material may be deposited over the inner plate between insulating layers after removing sacrificial layers. An etch-stop layer may protect the inner plate when sacrificial layers are removed. An etch-stop or interface layer may remain over the inner plate adjacent insulators.