公开(公告)号：US10752987B2

公开(公告)日：2020-08-25

申请号：US15899064

申请日：2018-02-19

Applicant: Intevac, Inc.

Inventor： Patrick Leahey ,  Eric Lawson ,  Charles Liu ,  Terry Bluck ,  Kevin P. Fairbairn ,  Robert L. Ruck ,  Samuel D. Harkness, IV

IPC: C23C14/34 ,  C23C14/50 ,  C23C14/56 ,  H01J37/32 ,  H01J37/34

Abstract: Disclosed is a substrate processing system which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. The system is constructed such that the substrates are processed therein vertically, and each chamber has a processing source attached to one sidewall thereof, wherein the other sidewall backs to a complementary processing chamber. The chamber system can be milled from a single block of metal, e.g., aluminum, wherein the block is milled from both sides, such that a wall remains and separates each two complementary processing chambers.

公开(公告)号：US20180171463A1

公开(公告)日：2018-06-21

申请号：US15899064

申请日：2018-02-19

Applicant: Intevac, Inc.

Inventor： Patrick Leahey ,  Eric Lawson ,  Charles Liu ,  Terry Bluck ,  Kevin P. Fairbairn ,  Robert L. Ruck ,  Samuel D. Harkness, IV

IPC: C23C14/34 ,  C23C14/50 ,  C23C14/56

Abstract: Disclosed is a substrate processing system which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. The system is constructed such that the substrates are processed therein vertically, and each chamber has a processing source attached to one sidewall thereof, wherein the other sidewall backs to a complementary processing chamber. The chamber system can be milled from a single block of metal, e.g., aluminum, wherein the block is milled from both sides, such that a wall remains and separates each two complementary processing chambers.

公开(公告)号：US09914994B2

公开(公告)日：2018-03-13

申请号：US13728145

申请日：2012-12-27

Applicant: Intevac, Inc.

Inventor： Patrick Leahey ,  Eric Lawson ,  Charles Liu ,  Terry Bluck ,  Kevin P. Fairbairn ,  Robert L. Ruck ,  Samuel D. Harkness, IV

IPC: C23C14/34 ,  C23C14/50 ,  C23C14/56

CPC classification number: C23C14/34 ,  C23C14/50 ,  C23C14/566 ,  C23C14/568

Abstract: Disclosed is a substrate processing system which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. The system is constructed such that the substrates are processed therein vertically, and each chamber has a processing source attached to one sidewall thereof, wherein the other sidewall backs to a complementary processing chamber. The chamber system can be milled from a single block of metal, e.g., aluminum, wherein the block is milled from both sides, such that a wall remains and separates each two complementary processing chambers.

公开(公告)号：US20130161183A1

公开(公告)日：2013-06-27

申请号：US13728145

申请日：2012-12-27

Applicant: Intevac, Inc.

Inventor： Patrick Leahey ,  Eric Lawson ,  Charles Liu ,  Terry Bluck ,  Kevin P. Fairbairn ,  Robert L. Ruck ,  Samuel D. Harkness, IV

IPC: C23C14/34

CPC classification number: C23C14/34 ,  C23C14/50 ,  C23C14/566 ,  C23C14/568

Abstract: Disclosed is a substrate processing system which enables combined static and pass-by processing. Also, a system architecture is provided, which reduces footprint size. The system is constructed such that the substrates are processed therein vertically, and each chamber has a processing source attached to one sidewall thereof, wherein the other sidewall backs to a complementary processing chamber. The chamber system can be milled from a single block of metal, e.g., aluminum, wherein the block is milled from both sides, such that a wall remains and separates each two complementary processing chambers.

Abstract translation: 公开了一种能够组合静态和通过处理的衬底处理系统。 此外，还提供了一种减小占位面积的系统架构。 该系统构造成使得基板在其中垂直处理，并且每个室具有附接到其一个侧壁的处理源，其中另一个侧壁返回到互补处理室。 室系统可以从单块金属例如铝碾磨，其中块从两侧铣削，使得壁保持并分离每两个补充处理室。