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公开(公告)号：US20210132014A1
公开(公告)日：2021-05-06
申请号：US16672738
申请日：2019-11-04
Applicant: INVENSENSE, INC.
Inventor： Nishit Goel , Stephen Bart
IPC: G01N33/00
Abstract: A gas sensor may include a plurality of elements that are responsive to particular gases based at least in part on the temperature of the temperature sensitive element. A first of the elements may be a gas detection element heated to a temperature at which it is responsive to a gas of interest. A plurality of additional elements may be configured in a reference element network and heated to a temperature at which they are not responsive to the gas of interest but are instead responsive to other effects such as humidity. The reference element network output may be used to remove the other effects (e.g., humidity) from the gas detection element output.
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公开(公告)号：US20240060875A1
公开(公告)日：2024-02-22
申请号：US17890016
申请日：2022-08-17
Applicant: InvenSense, Inc.
Inventor： Jeremy Parker , Nishit Goel , Stephen Bart
CPC classification number: G01N21/1702 , B81B7/02 , G01N2021/1704 , G01N2201/1218 , B81B2203/0127
Abstract: A bi-directional photoacoustic gas sensor includes a first photoacoustic cell, where an electromagnetic radiation source emits radiation to interact with an external gas and generate pressure waves that are detected by a MEMS diaphragm. A second photoacoustic cell has an interior volume and acoustic compliance that corresponds to the interior volume and acoustic compliance of the first photoacoustic cell. Processing circuitry within a substrate uses a first acoustic signal, received by the first photoacoustic cell, and a second acoustic signal, received by the second photoacoustic cell, to determine a bi-directional response of the gas sensor to remove noise and improve the sensor's signal-to-noise ratio.
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公开(公告)号：US12287280B2
公开(公告)日：2025-04-29
申请号：US17890016
申请日：2022-08-17
Applicant: InvenSense, Inc.
Inventor： Jeremy Parker , Nishit Goel , Stephen Bart
Abstract: A bi-directional photoacoustic gas sensor includes a first photoacoustic cell, where an electromagnetic radiation source emits radiation to interact with an external gas and generate pressure waves that are detected by a MEMS diaphragm. A second photoacoustic cell has an interior volume and acoustic compliance that corresponds to the interior volume and acoustic compliance of the first photoacoustic cell. Processing circuitry within a substrate uses a first acoustic signal, received by the first photoacoustic cell, and a second acoustic signal, received by the second photoacoustic cell, to determine a bi-directional response of the gas sensor to remove noise and improve the sensor's signal-to-noise ratio.
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公开(公告)号：US11162928B2
公开(公告)日：2021-11-02
申请号：US16672738
申请日：2019-11-04
Applicant: INVENSENSE, INC.
Inventor： Nishit Goel , Stephen Bart
IPC: G01N33/00
Abstract: A gas sensor may include a plurality of elements that are responsive to particular gases based at least in part on the temperature of the temperature sensitive element. A first of the elements may be a gas detection element heated to a temperature at which it is responsive to a gas of interest. A plurality of additional elements may be configured in a reference element network and heated to a temperature at which they are not responsive to the gas of interest but are instead responsive to other effects such as humidity. The reference element network output may be used to remove the other effects (e.g., humidity) from the gas detection element output.
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