公开(公告)号：JP2002212709A

公开(公告)日：2002-07-31

申请号：JP2001014591

申请日：2001-01-23

Applicant: JAPAN SCIENCE & TECH CORP

Inventor： SHINDO MASASHI ,  NAGASAKA MASAHIKO

IPC: C08J7/06 ,  B01J19/08 ,  B01J19/12 ,  C01B31/02 ,  C23C14/24 ,  C23C14/32 ,  C30B29/04

Abstract: PROBLEM TO BE SOLVED: To provide a high atmospheric pressure microwave discharge film forming method which is a method alternative to a microwave film forming method having been mainly utilized for CVD and comprises utilizing microwave electric force for evaporating and reacting the vapor with a gas so as to form a film, and to provide a high atmospheric pressure microwave discharge film forming device. SOLUTION: The device has an inner conductive body 6 and an outer conductive body 7 provided in coaxial electrode arrangement and a discharge chamber 1 in which an atmospheric gas is enclosed. The metal of the inner conductive body 6 is heated to a high temperature and the evaporated metal chemically reacts with reactive plasma so as to form a thin film.

公开(公告)号：JP2002078364A

公开(公告)日：2002-03-15

申请号：JP2000260140

申请日：2000-08-30

Applicant: JAPAN SCIENCE & TECH CORP

Inventor： SHINDO MASASHI

IPC: H01J45/00 ,  H01S3/00 ,  H02N3/00

Abstract: PROBLEM TO BE SOLVED: To provide an optical and thermal electron power generation method and apparatus, which can improve power generation efficiency by fully utilizing the wavelength of the powerful solar beam. SOLUTION: The solar beam 21 is collected using a Fresnel lens; an emitter electrode 6 is heated with the longer wavelength region of the solar beam 21; and the cesium atoms near the emitter electrode 6 are irradiated with the beam of the longer wavelength region, to generate discharge through excitation and ionization. Thereby, negative space charges near the emitter electrode 6 is neutralized, to cause the emitter current to increase.