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公开(公告)号:US10392699B2
公开(公告)日:2019-08-27
申请号:US15509662
申请日:2015-09-08
Applicant: JSR CORPORATION
Inventor: Hitoshi Hamaguchi , Kenrou Tanaka , Kenzou Ookita , Keisuke Kuriyama
IPC: C23C16/44 , H05K3/00 , G03F7/20 , B05D3/06 , B29C59/16 , C08J7/00 , G03F7/039 , C09D129/10 , C09D133/10 , C09D133/14 , C09D133/16 , C23C16/56 , H05K3/12 , G03F7/004 , G03F7/18 , G03F7/24
Abstract: The present invention relates to: a method of producing a structure having a recessed pattern; a resin composition; a method of forming an electroconductive film; an electronic circuit; and an electronic device. The method of producing a structure having a recessed pattern includes the following steps (i) and (ii), and the recessed pattern has a film thickness that is thinner by 5% to less than 90% with respect to that of a coating film obtained in the step (i): (i) the step of forming a coating film on a non-flat surface of a structure using a resin composition which includes an acid-dissociable group-containing polymer and an acid generator; and (ii) the step of forming a recess by subjecting a prescribed part of a portion of the coating film to irradiation with radiation.
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公开(公告)号:US10032920B2
公开(公告)日:2018-07-24
申请号:US15582823
申请日:2017-05-01
Applicant: JSR Corporation
Inventor: Hitoshi Hamaguchi , Kenrou Tanaka , Kenzou Ookita , Keisuke Kuriyama
IPC: H01L27/12 , H01L29/786 , H01L29/66 , H01L21/288
CPC classification number: H01L29/78636 , H01L21/28 , H01L21/288 , H01L29/66742 , H01L29/66757 , H01L29/66765 , H01L29/66969 , H01L29/78 , H01L29/7869
Abstract: The thin film transistor includes a first insulating layer provided on a substrate; a source electrode and a drain electrode that are provided on the first insulating layer; a semiconductor layer provided so as to cover the first insulating layer, the source electrode, and the drain electrode; a second insulating layer provided on the semiconductor layer; and a gate electrode provided on the second insulating layer, in which the first insulating layer is formed of a hydrophilic/hydrophobic material and has a recess portion, and the source electrode and the drain electrode are provided so as to fill the recess portion of the first insulating layer.
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公开(公告)号:US09980392B2
公开(公告)日:2018-05-22
申请号:US15262404
申请日:2016-09-12
Applicant: JSR CORPORATION
Inventor: Hitoshi Hamaguchi , Kenrou Tanaka , Kenzou Ookita , Keisuke Kuriyama
IPC: G03F7/039 , G03F7/36 , G03F7/40 , H03K3/10 , H05K3/12 , H05K3/10 , G03F7/004 , G03F7/027 , G03F7/20
CPC classification number: H05K3/107 , G03F7/0046 , G03F7/027 , G03F7/0392 , G03F7/36 , G03F7/40 , G03F7/70 , H05K3/105 , H05K3/1258
Abstract: A process for producing a substrate having wiring includes steps (i) to (v) described as follows: (i) applying a radiation-sensitive composition on a substrate to form a coating film; (ii) irradiating a prescribed part of the coating film with radiation to allow the coating film to have a radiation-irradiated region and a radiation-unirradiated region; (iii) allowing the coating film obtained in the step (ii) to have a concave region and a convex region; (iv) forming wiring on the concave region; and (v) removing the convex region by an application of radiation or by heating.
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公开(公告)号:US09746775B2
公开(公告)日:2017-08-29
申请号:US14888244
申请日:2014-04-15
Applicant: JSR CORPORATION
Inventor: Hitoshi Hamaguchi , Kenrou Tanaka , Kenzou Ookita , Keisuke Kuriyama
IPC: G03F7/039 , G03F7/038 , G03F7/36 , H05K1/02 , H05K3/12 , G03F7/38 , H05K3/10 , G03F7/004 , G03F7/16 , G03F7/20 , H05K3/28
CPC classification number: G03F7/38 , G03F7/0046 , G03F7/039 , G03F7/0392 , G03F7/16 , G03F7/20 , G03F7/36 , H05K1/0296 , H05K3/107 , H05K3/1208 , H05K3/287 , H05K2201/0145 , H05K2201/0154 , H05K2201/0166
Abstract: Provided is a method for manufacturing a substrate having a concave pattern to be used for forming a high-definition pattern while suppressing wet-spreading and bleeding of a film-forming ink, provided is a composition to be used for manufacturing the substrate, and provided are a method for forming a conductive film, an electronic circuit, and an electronic device.The method for manufacturing a substrate having a concave pattern includes: (i) a step of applying, on a substrate 1, a composition containing a polymer having an acid-dissociable group and an acid generator to form a coating film 2 and (ii) a step of irradiating a predetermined portion of the coating film 2 with radiation. The method for forming a conductive film includes applying a conductive film-forming ink on the concave pattern formed in the exposed portion of the coating film 2 and heating the ink to form a pattern 6. The electronic circuit and the electronic device are provided by using the method for forming a conductive film.
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