ELECTROLESS PLATING METHOD, AND METHOD AND APPARATUS FOR PRODUCING STAMPER
    1.
    发明公开
    ELECTROLESS PLATING METHOD, AND METHOD AND APPARATUS FOR PRODUCING STAMPER 失效
    松动的电源涂装工艺和模具的制造方法和设备

    公开(公告)号:EP0770705A4

    公开(公告)日:1997-02-03

    申请号:EP96907745

    申请日:1996-04-01

    Applicant: KAO CORP

    CPC classification number: G11B7/261 C23C18/26

    Abstract: A method and an apparatus for producing a stamper capable of producing in a high yield a stamper for producing a high quality optical disk. According to the conventional production technology of stampers, primary tin ions in a sensitizer containing the tin ions used for electric conduction treatment of a substrate surface are readily oxidized by dissolved oxygen and cause defects during the production of stampers. Therefore, even when a production apparatus is automated, substantially daily maintenance is necessary so as to keep satisfactory yield. The present invention carries out the electric conduction treatment of the substrate surface by treating the substrate surface by a treating solution containing a compound having a betaine structure and a polyoxyethylenealkylamine compound, then treating it by a colloidal solution containing tin and palladium and further conducting electroless plating. In this way, the present invention makes the maintenance work easier in an automated process and makes it possible to produce a high quality stamper with a high production yield.

    TREATMENT OF GLASS MASTER DISK, PRODUCTION OF MASTER DISK FOR OPTICAL DISK AND METHOD FOR REGENERATING GLASS MASTER DISK

    公开(公告)号:JPH0981973A

    公开(公告)日:1997-03-28

    申请号:JP23730995

    申请日:1995-09-14

    Applicant: KAO CORP

    Abstract: PROBLEM TO BE SOLVED: To produce a master disk having satisfactory adhesion of the resist by treating the surface of a glass master disk with an activator having a prescribed compsn. SOLUTION: The surface of a glass master disk is treated with one or more kinds of activators selected from among a quat. ammonium activator, an amine activator and a betaine activator. A photoresist layer is formed on the treated master disk, exposed and developed, an electrically conductive layer is formed by treatment for imparting electric conductivity and electroforming is carried out to produce a master disk for optical disk. In this method, the surface of the glass master disk is treated after washing and the objective good master disk for optical disk having satisfactory adhesion of the resist is produced.

    MANUFACTURE OF STAMPER FOR OPTICAL DISC

    公开(公告)号:JPH09109276A

    公开(公告)日:1997-04-28

    申请号:JP26878095

    申请日:1995-10-17

    Applicant: KAO CORP

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-quality stamper at a high yield by automated steps. SOLUTION: This method for manufacturing a stamper for an optical disc consists of a photosensitive layer forming step of forming a photosensitive layer after cleaning a substrate, a drying step of drying the photosensitive layer, a photosensitive step of performing photosensitization according to desired data, an electroconductive step of performing an electroconductive process of a surface by electroless plating, and a metal layer forming step of forming a nickel metal layer on an electroconductive surface using an electrocasting method. When performing these steps, under the electroconductive process, at least, the surface is treated with a negative charge neutralizing agent, then is treated with a tin-palladium treating agent, and further, is treated with a promoter to remove the tin component. After that, the surface is treated with an electroless nickel liquid. Every process in the electroconductive step represents a method for manufacturing a stamper for an optical disc using a spin coating process.

    ELECTROLESS PLATING METHOD AND PRODUCTION OF STAMPER

    公开(公告)号:JPH08283950A

    公开(公告)日:1996-10-29

    申请号:JP8435395

    申请日:1995-04-10

    Applicant: KAO CORP

    Abstract: PURPOSE: To obtain an excellent plated film without deteriorating the surface of a substrate by treating the surface of a resin molding substrate, on which a photoresist film is formed, with a specific copolymer, activating to adsorb a catalyst nucleus and electroless plating. CONSTITUTION: The surface of the substrate is treated with the copolymer having a quaternary ammonium salt residual group and an ethylene glycol residual chain group in the side chain. Next, the surface is treated with a tin- palladium based activating agent and plated after the catalyst nucleus is adsorbed thereon. The polymer is a copolymer of a monomer having the ammonium salt group, a monomer having ethylene glycol and preferably further a monomer having >=4C hydrocarbon or one obtained by making the copolymer quaternary. At the time of treating, it is preferable to dip the substrate into 1-5wt.% aq. solution of the polymer for 0.3-3min or to spray the polymer solution to the substrate. And the electroless plating solution is not particularly restricted, but nickel base is preferable.

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