公开(公告)号：KR20180071405A

公开(公告)日：2018-06-27

申请号：KR20187017048

申请日：2016-11-17

Applicant: KLA TENCOR CORP

Inventor： BHASKAR KRIS ,  JORDAN III JOHN R ,  KARSENTI LAURENT ,  VENKATARAMAN SANKAR ,  CARMON YAIR

IPC: G01N21/88 ,  G01N21/956

CPC classification number: G06T7/0004 ,  G06K9/4642 ,  G06K9/6256 ,  G06K9/6269 ,  G06K9/6287 ,  G06T7/0079 ,  G06T2207/10061 ,  G06T2207/20021 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: 시편상의결함을검출하기위한방법및 시스템이제공된다. 하나의시스템은생성모델을포함한다. 생성모델은입력특징맵 볼륨의픽셀블록을레이블에매핑하도록구성된비선형네트워크를포함한다. 레이블은블록의하나이상의결함관련특성들을나타낸다. 시스템은하나의테스트이미지를생성모델에입력하며, 이모델은단일의테스트이미지내 픽셀블록의특징을결정하고매핑에기초하여블록에대한레이블을결정한다. 시스템은결정된레이블에기초하여시편의결함을검출한다.

公开(公告)号：SG11201803666WA

公开(公告)日：2018-06-28

申请号：SG11201803666W

申请日：2016-11-17

Applicant: KLA TENCOR CORP

Inventor： BHASKAR KRIS ,  JORDAN III JOHN R ,  KARSENTI LAURENT ,  VENKATARAMAN SANKAR ,  CARMON YAIR

IPC: G01N21/88

Abstract: Methods and systems for detecting defects on a specimen are provided. One system includes a generative model. The generative model includes a non-linear network configured for mapping blocks of pixels of an input feature map volume into labels. The labels are indicative of one or more defect-related characteristics of the blocks. The system inputs a single test image into the generative model, which determines features of blocks of pixels in the single test image and determines labels for the blocks based on the mapping. The system detects defects on the specimen based on the determined labels.