公开(公告)号：SG10202104271VA

公开(公告)日：2021-06-29

申请号：SG10202104271V

申请日：2017-09-18

Applicant: KLA TENCOR CORP

Inventor： ZHANG JING ,  ROULO MARK ,  BHASKAR KRIS ,  DONAPATI RAVI C

Abstract: Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.