公开(公告)号：KR20180071404A

公开(公告)日：2018-06-27

申请号：KR20187017023

申请日：2016-11-16

Applicant: KLA TENCOR CORP

Inventor： MAHER CHRISTOPHER ,  BRAUER BJORN ,  RAMACHANDRAN VIJAY ,  KARSENTI LAURENT ,  ROSENGAUS ELIEZER ,  JORDAN JOHN ,  MILLER RONI

IPC: G06T7/00 ,  G01N21/17 ,  G01N21/88

CPC classification number: G06T7/001 ,  G06K9/6202 ,  G06K9/6212 ,  G06K9/74 ,  G06T7/11 ,  G06T2207/20182 ,  G06T2207/30148

Abstract: 결함검출방법은, 기준이미지를획득하는것; 기준이미지의타겟영역을선택하는것; 매칭메트릭에기초하여, 타겟영역에대응하는기준이미지의하나이상의비교영역을식별하는것; 테스트이미지를획득하는것; 기준이미지의타겟영역및 기준이미지의하나이상의비교영역으로테스트이미지를마스킹하는것; 테스트이미지의하나이상의비교영역에기초하여테스트이미지의타겟영역에대한결함임계치를정의하는것; 및결함임계치에기초하여테스트이미지의타겟영역이결함을포함하는지의여부를결정하는것을포함한다.

公开(公告)号：SG11201803667RA

公开(公告)日：2018-06-28

申请号：SG11201803667R

申请日：2016-11-16

Applicant: KLA TENCOR CORP

Inventor： MAHER CHRISTOPHER ,  BRAUER BJORN ,  RAMACHANDRAN VIJAY ,  KARSENTI LAURENT ,  ROSENGAUS ELIEZER ,  JORDAN JOHN ,  MILLER RONI

IPC: G06T7/00 ,  G01N21/17 ,  G01N21/88

Abstract: A defect detection method includes acquiring a reference image; selecting a target region of the reference image; identifying, based on a matching metric, one or more comparative regions of the reference image corresponding to the target region; acquiring a test image; masking the test image with the target region of the reference image and the one or more comparative regions of the reference image; defining a defect threshold for the target region in the test image based on the one or more comparative regions in the test image; and determining whether the target region of the test image contains a defect based on the defect threshold.