公开(公告)号：WO2017049219A1

公开(公告)日：2017-03-23

申请号：PCT/US2016/052323

申请日：2016-09-16

Applicant: KLA-TENCOR CORPORATION

Inventor： HE, Li ,  PLIHAL, Martin ,  YING, Huajun ,  BHATIA, Anadi ,  DANDIANA, Amitoz S. ,  RAMINI, Ramakanth

IPC: H01L21/66

CPC classification number: G01N21/9501 ,  G01N2201/06113 ,  G01N2201/12 ,  G06N99/005

Abstract: Methods and systems for classifying defects detected on a specimen with an adaptive automatic defect classifier are provided. One method includes creating a defect classifier based on classifications received from a user for different groups of defects in first lot results and a training set of defects that includes all the defects in the first lot results. The first and additional lot results are combined to create cumulative lot results. Defects in the cumulative lot results are classified with the created defect classifier. If any of the defects are classified with a confidence below a threshold, the defect classifier is modified based on a modified training set that includes the low confidence classified defects and classifications for these defects received from a user. The modified defect classifier is then used to classify defects in additional cumulative lot results.

Abstract translation: 提供了使用自适应自动缺陷分类器对样本上检测到的缺陷进行分类的方法和系统。 一种方法包括基于从用户接收的针对第一批结果中的不同缺陷组的分类创建缺陷分类器，以及包括第一批次结果中的所有缺陷的训练缺陷集合。 第一个和另外的批次结果相结合以创建累积的批量结果。 累积批次结果中的缺陷根据创建的缺陷分类器进行分类。 如果任何缺陷以低于阈值的置信度分类，则基于修改的训练集修改缺陷分类器，所述修改训练集包括从用户接收的这些缺陷的低置信分类缺陷和分类。 然后使用修改后的缺陷分类器对附加累积批次结果中的缺陷进行分类。