公开(公告)号：WO2014062972A1

公开(公告)日：2014-04-24

申请号：PCT/US2013/065527

申请日：2013-10-17

Applicant: KLA-TENCOR CORPORATION

Inventor： BRINGOLTZ, Barak ,  KANDEL, Daniel ,  FELER, Yoel ,  SAPIENS, Noam ,  IRINA, Paykin ,  SVIZHER, Alexander ,  ALONI, Meir ,  BEN DOV, Guy ,  SHALMONI, Hadar ,  LEVINSKI, Vladimir

IPC: G01N21/47 ,  G01B9/02 ,  H01L21/66

CPC classification number: G01N21/01 ,  G01B11/272 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/068 ,  G02B27/4255 ,  G02B27/4272 ,  G03F7/70633 ,  G03F7/70683

Abstract: Metrology methods, systems and targets are provided, which implement a side by side paradigm. Adjacent cells with periodic structures are used to extract the overlay error, e.g., by introducing controllable phase shifts or image shifts which enable algorithmic computation of the overlay. The periodic structures are designed to exhibit a rotational symmetry to support the computation and reduce errors.

Abstract translation: 提供了计量方法，系统和目标，实现了并行范例。 使用具有周期性结构的相邻小区来提取覆盖误差，例如通过引入可控相移或图像偏移，这使得能够进行覆盖的算法计算。 周期性结构被设计为展现旋转对称性以支持计算并减少误差。