公开(公告)号：US09702693B2

公开(公告)日：2017-07-11

申请号：US15136855

申请日：2016-04-22

Applicant: KLA-Tencor Corporation

Inventor： Mark Ghinovker ,  Michael Adel ,  Walter D. Mieher ,  Ady Levy ,  Dan Wack

IPC: G03F7/20 ,  G01B11/27 ,  G01N21/47 ,  G01N21/95 ,  H01L21/68 ,  H01L23/544

CPC classification number: G01B11/272 ,  G01N21/4785 ,  G01N21/9501 ,  G03F7/70633 ,  H01L21/68 ,  H01L21/682 ,  H01L23/544 ,  Y10S438/975

Abstract: A metrology system for determining overlay is disclosed. The system includes an optical assembly for capturing images of an overlay mark and a computer for analyzing the captured images to determine whether there is an overlay error. The mark comprises first and second regions that each include at least two separately generated working zones, juxtaposed relative to one another, configured to provide overlay information in a first direction, and include a periodic structure having coarsely segmented elements. The mark comprises third and fourth regions that each include at least two separately generated working zones, juxtaposed relative to one another, configured to provide overlay information in a second direction, and include a periodic structure having coarsely segmented elements. Working zones of the first and second regions are diagonally opposed and spatially offset relative to one another, and the working zones of the third and fourth regions are diagonally opposed and spatially offset relative to one another.

公开(公告)号：US20160313116A1

公开(公告)日：2016-10-27

申请号：US15136855

申请日：2016-04-22

Applicant: KLA-Tencor Corporation

Inventor： Mark Ghinovker ,  Michael Adel ,  Walter D. Mieher ,  Ady Levy ,  Dan Wack

IPC: G01B11/27

CPC classification number: G01B11/272 ,  G01N21/4785 ,  G01N21/9501 ,  G03F7/70633 ,  H01L21/68 ,  H01L21/682 ,  H01L23/544 ,  Y10S438/975

Abstract: A metrology system for determining overlay is disclosed. The system includes an optical assembly for capturing images of an overlay mark and a computer for analyzing the captured images to determine whether there is an overlay error. The mark comprises first and second regions that each include at least two separately generated working zones, juxtaposed relative to one another, configured to provide overlay information in a first direction, and include a periodic structure having coarsely segmented elements. The mark comprises third and fourth regions that each include at least two separately generated working zones, juxtaposed relative to one another, configured to provide overlay information in a second direction, and include a periodic structure having coarsely segmented elements. Working zones of the first and second regions are diagonally opposed and spatially offset relative to one another, and the working zones of the third and fourth regions are diagonally opposed and spatially offset relative to one another.

Abstract translation: 公开了一种用于确定覆盖层的计量系统。 该系统包括用于捕获覆盖标记的图像的光学组件和用于分析所捕获图像的计算机，以确定是否存在重叠错误。 标记包括第一和第二区域，每个区域包括至少两个单独生成的工作区域，其相对于彼此并置，被配置为在第一方向上提供覆盖信息，并且包括具有粗分段元素的周期性结构。 标记包括第三和第四区域，每个区域包括相对于彼此并置的至少两个单独生成的工作区域，其被配置为在第二方向上提供覆盖信息，并且包括具有粗分段元素的周期性结构。 第一区域和第二区域的工作区域相对于彼此对角地相对并且在空间上偏移，并且第三区域和第四区域的工作区域相对于彼此对角地相对并且在空间上偏移。