公开(公告)号：US20140231659A1

公开(公告)日：2014-08-21

申请号：US14176587

申请日：2014-02-10

Applicant: KLA-Tencor Corporation

Inventor： Frank Chilese ,  John R. Torczynski ,  Rudy Garcia ,  Leonard E. Klebanoff ,  Gildardo R. Delgado ,  Daniel J. Rader ,  Anthony S. Geller ,  Michail A. Gallis

IPC: G01N21/01 ,  G01N21/59

CPC classification number: G01N21/59 ,  G03F7/70933 ,  G03F7/70983

Abstract: An apparatus for use with extreme ultraviolet (EUV) light comprising A) a duct having a first end opening, a second end opening and an intermediate opening intermediate the first end opening the second end opening, B) an optical component disposed to receive EUV light from the second end opening or to send light through the second end opening, and C) a source of low pressure gas at a first pressure to flow through the duct, the gas having a high transmission of EUV light, fluidly coupled to the intermediate opening. In addition to or rather than gas flow the apparatus may have A) a low pressure gas with a heat control unit thermally coupled. to at least one of the duct and the optical component and/or B) a voltage device to generate voltage between a first portion and a second portion of the duet with a grounded insulative portion therebetween.

Abstract translation: 一种用于极紫外（EUV）光的装置，包括：A）具有第一端开口，第二端开口和中间开口的管道，所述第一端开口位于第二端开口的中间，B）设置成接收EUV光的光学部件 从第二端开口或通过第二端开口发射光，以及C）处于第一压力的低压气体源流过管道，该气体具有高透光率的EUV光，其流体耦合到中间开口 。 除了或不是气流，装置可具有A）具有热耦合的热控制单元的低压气体。 到所述管道和所述光学部件中的至少一个和/或B）在所述二重体的第一部分和第二部分之间产生电压的电压装置，其间具有接地绝缘部分。

公开(公告)号：US09759912B2

公开(公告)日：2017-09-12

申请号：US14034273

申请日：2013-09-23

Applicant: KLA-Tencor Corporation ,  Sandia Corporation

Inventor： Frank Chilese ,  Gildardo R. Delgado ,  Daniel Wack ,  John R. Torczynski ,  Leonard E. Klebanoff

IPC: G02B27/00

CPC classification number: G02B27/0006

Abstract: An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.

公开(公告)号：US09389180B2

公开(公告)日：2016-07-12

申请号：US14176587

申请日：2014-02-10

Applicant: KLA-Tencor Corporation

Inventor： Francis C. Chilese ,  John R. Torczynski ,  Rudy Garcia ,  Leonard E. Klebanoff ,  Gildardo R. Delgado ,  Daniel J. Rader ,  Anthony S. Geller ,  Michail A. Gallis

IPC: G01J1/42 ,  G01N21/59 ,  G03F7/20

CPC classification number: G01N21/59 ,  G03F7/70933 ,  G03F7/70983

Abstract: An apparatus for use with extreme ultraviolet (EUV) light comprising A) a duct having a first end opening, a second end opening and an intermediate opening intermediate the first end opening the second end opening, B) an optical component disposed to receive EUV light from the second end opening or to send light through the second end opening, and C) a source of low pressure gas at a first pressure to flow through the duct, the gas having a high transmission of EUV light, fluidly coupled to the intermediate opening. In addition to or rather than gas flow the apparatus may have A) a low pressure gas with a heat control unit thermally coupled to at least one of the duct and the optical component and/or B) a voltage device to generate voltage between a first portion and a second portion of the duet with a grounded insulative portion therebetween.

Abstract translation: 一种用于极紫外（EUV）光的装置，包括：A）具有第一端开口，第二端开口和中间开口的管道，所述第一端开口位于第二端开口的中间，B）设置成接收EUV光的光学部件 从第二端开口或通过第二端开口发射光，以及C）处于第一压力的低压气体源流过管道，该气体具有高透光率的EUV光，其流体耦合到中间开口 。 除了或不是气体流动之外，装置可以具有A）具有热耦合到管道和光学部件中的至少一个的热控制单元的低压气体和/或B）用于在第一 二重奏部分和第二部分之间具有接地绝缘部分。

公开(公告)号：US20140085724A1

公开(公告)日：2014-03-27

申请号：US14034273

申请日：2013-09-23

Applicant: Sandia Corporation ,  KLA-Tencor Corporation

Inventor： Frank Chilese ,  Gildardo R. Delgado ,  Daniel Wack ,  John R. Torczynski ,  Leonard E. Klebanoff

IPC: G02B27/00

CPC classification number: G02B27/0006

Abstract: An apparatus for contaminant control, having: a first optical assembly including: a first light homogenizer tunnel with: a first end connected to an extreme ultra-violet light source, a second end in communication with a destination chamber, a first enclosed space, and, a first gas input arranged to introduce a first gas such that the first gas flows in a first direction toward the first end and in a second direction toward the second end. The apparatus alternately having: a second optical assembly including: a second light homogenizer tunnel with: a third end connected to an extreme ultra-violet light source, a fourth end in communication with a destination chamber, a second enclosed space, a diffusion barrier tube including: a fifth end facing the fourth end and a sixth end in communication with a destination chamber, and a second gas input between the second light homogenizer tunnel and the diffusion tube.

Abstract translation: 一种用于污染物控制的装置，具有：第一光学组件，包括：第一光均化器隧道，其具有：连接到极紫外光源的第一端，与目的地室连通的第二端，第一封闭空间，以及 第一气体输入装置，其被布置成引入第一气体，使得第一气体沿第一方向朝向第一端部流动，并沿第二方向朝向第二端部流动。 所述装置交替地具有：第二光学组件，其包括：第二光均化器隧道，其具有连接到极紫外光源的第三端，与目的地室连通的第四端，第二封闭空间，扩散阻挡管 包括：面向第四端的第五端和与目的地室连通的第六端，以及在第二光均化器通道和扩散管之间的第二气体输入。