公开(公告)号：US11410830B1

公开(公告)日：2022-08-09

申请号：US16421004

申请日：2019-05-23

Applicant: KLA-Tencor Corporation

Inventor： Hong Xiao ,  Lawrence Muray ,  Nick Petrone ,  John Gerling ,  Abdurrahman Sezginer ,  Alan D. Brodie ,  Kuljit Virk ,  Qiang Q. Zhang ,  Grace Hsiu-Ling Chen

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/28

Abstract: A system is disclosed. In one embodiment, the system includes a scanning electron microscopy sub-system including an electron source configured to generate an electron beam and an electron-optical assembly including one or more electron-optical elements configured to direct the electron beam to the specimen. In another embodiment, the system includes one or more grounding paths coupled to the specimen, the one or more grounding paths configured to generate one or more transmission signals based on one or more received electron beam-induced transmission currents. In another embodiment, the system includes a controller configured to: generate control signals configured to cause the scanning electron microscopy sub-system to scan the portion of the electron beam across a portion of the specimen; receive the transmission signals via the one or more grounding paths; and generate transmission current images based on the transmission signals.