公开(公告)号：US10699868B2

公开(公告)日：2020-06-30

申请号：US16185527

申请日：2018-11-09

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Chang Min Choi ,  Myoung Choul Choi ,  Sang Ju Lee ,  Ji Young Baek ,  Jeong Jin Kim

IPC: H01J37/08 ,  G01N29/44 ,  H01J37/244

Abstract: Disclosed is a device for generating an organic molecular cluster ion beam, the device including a receiver configured to accommodate an organic material, a cluster generator configured to generate a cluster by supersonic expanding the organic material accommodated in the receiver at a high speed, a photo-ionizer configured to temporarily accommodate the cluster that is generated through the cluster generator, an ultraviolet (UV) light source configured to irradiate an UV pulse to the photo-ionizer to ionize the cluster, and entrance electrodes disposed at both sides of the photo-ionizer and configured to provide a potential difference to the photo-ionizer to generate a cluster ion beam.