公开(公告)号：DE102005045315B4

公开(公告)日：2011-01-20

申请号：DE102005045315

申请日：2005-09-22

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： CHOI SANG KUK ,  KIM DAE JUN ,  JEONG JIN WOO ,  KIM DAE YONG

IPC: G12B5/00 ,  B23Q16/00

公开(公告)号：DE102005045315A1

公开(公告)日：2006-06-29

申请号：DE102005045315

申请日：2005-09-22

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： CHOI SANG KUK ,  KIM DAE JUN ,  JEONG JIN WOO ,  KIM DAE YONG

IPC: G12B5/00 ,  B23Q16/00

Abstract: Provided is a micro stage comprising: a body having a vertically perforated through-hole passing through a central portion thereof; a bobbin including a tip portion with an electron emission tip embedded in the center thereof, and passing through the through-hole of the body to be moved in the through-hole along a first axis perpendicular to a vertical direction; a first piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in one direction along the first axis; a second piezoelectric element disposed on the body and lengthened when a voltage is applied thereto to push the bobbin in the other direction along the first axis; and an upper cover that is coupled to an upper portion of the body and has a through-hole, through which the bobbin passes and communicates with the through-hole of the body, wherein the bobbin can be positioned as desired along the first axis by adjusting the voltages applied to the first piezoelectric element and the second piezoelectric element. Accordingly, the emission tip can be exactly and stably positioned using only the movable piezoelectric elements.