公开(公告)号：JPH01173736A

公开(公告)日：1989-07-10

申请号：JP19286388

申请日：1988-08-03

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： RI SOUSHIYU ,  KIYOU HOUKIYUU ,  BOKU KATSUNORI ,  YUU KEISHIYUN

IPC: H01L21/677 ,  B25J9/04 ,  B25J15/00 ,  H01L21/687

Abstract: PURPOSE: To make it possible to easily shift an wafer of a different diameter without replacing a device by forming an wafer supporting part having plural fixed pins on the front side of a machine arm and forming a constant pressure spring for energizing slide arm to the front side. CONSTITUTION: Fixed pins 41, 411 having respectively different height and a fixed pin 412 to be optionally depressed are arranged on the front end of the wafer supporting part 40 and an wafer of a maximum diameter is supported by the pin 41 and a balance pin 43. The slide arm 31 is arranged so as to be optionally slidden against the machine arm 30 and holds the center of the wafer on the center of the supporting part 40 in cooperation with one of the pins 41, 43, 411. 412. The constant pressure spring 53 is arranged on the rear side of the arm 30 so as to hold the wafer by energizing the arm 31 to the front side by fixed pressure. Consequently an wafer of a different diameter can be safely and accurately transferred in the coincident state of the wafer center with the arm center without replacing the machine arm.