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公开(公告)号：JPH09169600A
公开(公告)日：1997-06-30
申请号：JP20152296
申请日：1996-07-31
Applicant: KOREA ELECTRONICS TELECOMM
Inventor： JIEJIN RII , HEGUUON RII , KIYUNSUU SUU , KIISUU NAMU
IPC: C01B21/06 , C30B29/38 , H01L21/203 , H01L21/205 , H01L21/318 , H01L33/32 , H01L33/00
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