公开(公告)号：KR20120063855A

公开(公告)日：2012-06-18

申请号：KR20100125013

申请日：2010-12-08

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： PARK BYOUNG JUN ,  KIM SANG HYEOB ,  CHUNG MYUNG AE ,  SHIN KYU SANG

IPC: H01L27/146

CPC classification number: H01L27/14625

Abstract: PURPOSE: An image sensor and a manufacturing method thereof are provided to prevent distortion of light due to spherical aberration by forming a prism between a photoelectric conversion element and a color filter layer. CONSTITUTION: A plurality of photoelectric conversion elements(20) is formed on a substrate(10). A optical waveguide layer(50) is formed on the plurality of photoelectric conversion elements. The plurality of photoelectric conversion elements changes light applied through the optical waveguide layer into an electric signal. A color filter layer(70) is formed on the optical waveguide layer. A plurality of prisms(60) is formed between the color filter layer and the optical waveguide layer. The plurality of prisms is formed into an inverted pyramid shape or reversed trapezoidal shape.

Abstract translation: 目的：提供一种图像传感器及其制造方法，以通过在光电转换元件和滤色器层之间形成棱镜来防止由于球面像差引起的光的变形。 构成：在基板（10）上形成多个光电转换元件（20）。 在多个光电转换元件上形成光波导层（50）。 多个光电转换元件将通过光波导层施加的光改变为电信号。 滤光层（70）形成在光波导层上。 在滤色器层和光波导层之间形成多个棱镜（60）。 多个棱镜形成倒棱锥形或倒梯形。