公开(公告)号：KR20090059792A

公开(公告)日：2009-06-11

申请号：KR20070126836

申请日：2007-12-07

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： LEE HONG YEOL ,  MOON SEUNG EON ,  PARK JONGH YURK ,  KWAK JUN HYUK ,  PARK SO JEONG ,  PARK KANG HO ,  KIM JONG DAE

IPC: F24B1/187 ,  G01N27/14

CPC classification number: G01N27/14 ,  H05B3/20

Abstract: A micro heater, a micro heater manufacturing method and an environment sensor using the same are provided to prevent mechanical deformation and deformation due to heat by reducing heat loss and using a silicon oxide film and a silicon nitride film. A micro heater(400) comprises: an elastic film formed by successively evaporates a first silicon oxide film, a silicon nitride film and a second silicon oxide film; a heating part(200), and a diffusing plate(250) and a heating part electrode(210) which are formed on the top of the elastic film; and an insulating film formed on the upper end of the heating part, the diffusing plate and the heating part electrode. The diffusing plate comprises a junction part vertically connected to the heating part.

Abstract translation: 提供微加热器，微加热器制造方法和使用该微加热器制造方法的环境传感器，以通过减少热损失并使用氧化硅膜和氮化硅膜来防止机械变形和热变形。 微加热器（400）包括：通过连续蒸发第一氧化硅膜，氮化硅膜和第二氧化硅膜而形成的弹性膜; 加热部分（200）和扩散板（250）和加热部分电极（210），其形成在弹性膜的顶部上; 以及形成在加热部的上端，扩散板和加热部电极上的绝缘膜。 扩散板包括垂直连接到加热部分的接合部分。