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公开(公告)号：JPH0971495A
公开(公告)日：1997-03-18
申请号：JP31889095
申请日：1995-12-07
Applicant: KOREA ELECTRONICS TELECOMM
Inventor： HAKU SHIYOUKIYOU , RI BIYON
IPC: C23C16/44 , C23C16/455 , C30B25/14 , C30B29/40 , H01L21/205 , H01L21/285
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