公开(公告)号：JPH0290119A

公开(公告)日：1990-03-29

申请号：JP20846688

申请日：1988-08-24

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： SHIYU BUTEI

IPC: G02B21/18 ,  B23K26/00 ,  B23K26/064 ,  G02B7/28 ,  G02B27/00 ,  G02B27/09 ,  G03F7/20 ,  G06K9/00 ,  H01L21/027 ,  H01S3/101

Abstract: PURPOSE: To observe a subject and the converged state of laser light flux without being affected by anything even if the diameter of laser light flux is changed by guiding laser light flux converged by a movable converging lens for a beam splitter and reflecting laser light flux in the direction of the converging lens. CONSTITUTION: The converging lens L3 converging laser light flux and the beam splitter BS (light flux separator) are installed for an observation microscope installed so that the converging lens L1 and an eyepiece lens L2 can freely move on a stand 1 movable in a plane. The size and the state of laser light flux converged on a sample face can be observed. At the same time, the diameter of light flux can be controlled to arbitrarily desired size. Thus, the diameter of light flux can be changed without affecting an observation function different from a case when a distance between the converging lens L1 and a sample face is adjusted without providing a different converging lens for an existed laser plotting machine.