公开(公告)号：US20180254403A1

公开(公告)日：2018-09-06

申请号：US15895530

申请日：2018-02-13

Applicant: KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY

Inventor： Young Hun JEONG ,  Jeong Ho CHO ,  Jong Hoo PAIK ,  Min Seon LEE

IPC: H01L41/047 ,  H01L41/083 ,  H01L41/273 ,  H04R17/00

CPC classification number: H01L41/0471 ,  H01L41/083 ,  H01L41/273 ,  H04R17/005

Abstract: An interdigitated electrode patterned multi-layered piezoelectric laminate structure is provided, which comprises: N vertically stacked piezoelectric stacks (N is the integer of 2 or above); wherein the each piezoelectric stack comprises: a piezoelectric sheet; a top electrode pattern on a top of the piezoelectric sheet; and a bottom electrode pattern on a bottom of the piezoelectric sheet, wherein each of the top and bottom electrode patterns has first and second sub-electrode patterns, wherein the first and second sub-electrode patterns are electrically insulated from each other, wherein the first and second sub-electrode patterns are horizontally interdigitated with each other, wherein the first sub-electrode patterns of the top and bottom electrode patterns vertically overlap with each other, wherein the second sub-electrode patterns of the top and bottom electrode patterns vertically overlap with each other, wherein the bottom electrode of the Nth piezoelectric stack is the top electrode of the N-1th piezoelectric stack.