公开(公告)号：US11097943B2

公开(公告)日：2021-08-24

申请号：US16294032

申请日：2019-03-06

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Byung Chui Lee ,  Jin Soo Park ,  Mintack Oh ,  Jin Hyun Kim

IPC: B81C1/00 ,  H01L41/09 ,  H01L41/113 ,  H01L21/762 ,  H01L29/78

Abstract: A membrane device includes a trench substrate having trenches and a membrane having wrinkles. The membrane is not bonded to the trenches of the trench substrate but is bonded to the surface of the trench substrate in the shoulders of the trenches. Hills and valleys are alternately arranged in the membrane along the trenches. The membrane device can be used in various applications (for example, sensors) based on variations in the electrical properties of the membrane caused by a change in the shape of the wrinkles (a change in the strain) of the membrane in response to a change in the internal or external environment of the trenches.

公开(公告)号：US20190322524A1

公开(公告)日：2019-10-24

申请号：US16294032

申请日：2019-03-06

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Byung Chul Lee ,  Jin Soo Park ,  Mintack Oh ,  Jin Hyun Kim

IPC: B81C1/00 ,  H01L21/762

Abstract: A membrane device includes a trench substrate having trenches and a membrane having wrinkles. The membrane is not bonded to the trenches of the trench substrate but is bonded to the surface of the trench substrate in the shoulders of the trenches. Hills and valleys are alternately arranged in the membrane along the trenches. The membrane device can be used in various applications (for example, sensors) based on variations in the electrical properties of the membrane caused by a change in the shape of the wrinkles (a change in the strain) of the membrane in response to a change in the internal or external environment of the trenches.