公开(公告)号：US20190025204A1

公开(公告)日：2019-01-24

申请号：US15935055

申请日：2018-03-26

Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Yong-Sang RYU ,  Chulki KIM ,  Young Min JHON ,  Sin-Doo LEE ,  Eui-Sang YU ,  Jae Hun KIM

IPC: G01N21/41 ,  H01J37/305 ,  H01L31/09 ,  G01N21/552 ,  G01N21/27

Abstract: A method for manufacturing an optical sensor includes forming a reflective metal layer on a substrate, forming an insulator layer on the reflective metal layer, inducing self-assembly of a metal nanostructure layer on the insulator layer, and selectively etching the insulator layer through a reactive ion etching process to form a plurality of pillars and a plurality of spaces defined by the plurality of pillars. The method for manufacturing a plasmonic optical sensor according to this embodiment facilitates the formation of nanostructures difficult to pattern and form on the large scale at a low cost, and provides a plasmonic optical sensor with repeatability.