公开(公告)号：EP3056935A4

公开(公告)日：2017-08-02

申请号：EP13895294

申请日：2013-10-11

Applicant: KOREA OPTRON CORP

Inventor： KIM KYUNGSU ,  KIM JUNIL ,  LEE JONGHYUN ,  MOON SEUNGHWAN

IPC: G02B26/08 ,  B81B3/00 ,  B81C1/00 ,  G02B5/08 ,  G02B26/10 ,  G03B21/00 ,  H01L21/02 ,  H02N1/00 ,  H04N3/08

CPC classification number: G02B26/0841 ,  B81B3/0048 ,  B81B2201/033 ,  G02B26/10 ,  G02B26/105 ,  G03B21/008 ,  H02N1/008 ,  H04N3/08

Abstract: Provided is an MEMS scanner, which includes a lower frame, a pair of upper frames, a pair of levers, a pair of fixed electrode portions, and a driving electrode portion. The lower frame has cavities formed in an upper surface of the lower frame, and a through-hole is formed between the cavities. The pair of upper frames are attached to the upper surface of the lower frame around the cavities to form an installation space in the central portion between the upper frames. The pair of levers are attached to a bottom surface of the both cavities with the through-hole as a center, and are connected to the pair of upper frames, respectively. One sides of the pair of fixed electrode portions are connected to the respective levers and the other sides thereof are connected to the upper frames, the pair of fixed electrode portions have a plurality of fixed electrodes that can be sloped with respect to the horizontal surface, and the plurality of fixed electrodes are disposed toward the through-hole. The driving electrode portion has a plurality of driving electrodes that are alternately disposed with respect to the fixed electrodes of the pair of fixed electrode portions and are disposed in parallel on the upper surfaces of the respective upper frames at both sides of the driving electrode portion, and sides opposite to sides in which the plurality of driving electrodes are formed are attached to the upper surface of the lower frame using rotational springs, respectively.

Abstract translation: 提供了一种MEMS扫描仪，其包括下框架，一对上框架，一对杠杆，一对固定电极部分和驱动电极部分。 下框架具有形成在下框架的上表面中的空腔，并且在空腔之间形成通孔。 一对上部框架围绕空腔附接到下部框架的上表面，以在上部框架之间的中央部分中形成安装空间。 一对杆分别以贯通孔为中心安装在两腔体的底面上，分别与一对上框架连结。 一对固定电极部分的一侧连接到相应的杠杆并且其另一侧连接到上部框架，一对固定电极部分具有多个可相对于水平表面倾斜的固定电极， 并且多个固定电极朝向通孔设置。 驱动电极部分具有相对于该对固定电极部分的固定电极交替设置的多个驱动电极，并且在驱动电极部分的两侧平行地设置在相应上框架的上表面上， 并且与形成多个驱动电极的侧面相对的侧面分别使用旋转弹簧附接到下框架的上表面。