公开(公告)号：WO2010147300A2

公开(公告)日：2010-12-23

申请号：PCT/KR2010/002461

申请日：2010-04-20

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  CHO, Yong Jai ,  CHO, Hyun Mo ,  CHEGAL, Won

Inventor： CHO, Yong Jai ,  CHO, Hyun Mo ,  CHEGAL, Won

IPC: G01N21/21 ,  G01N21/25 ,  G01N21/41 ,  G02B5/08

CPC classification number: G01N21/211 ,  G02B27/143

Abstract: The present invention relates to an ellipsometer using a half-mirror, and more particularly, to an ellipsometer using a half-mirror, in which, instead of using rectangular prism type or glass plate type beam splitter that transmits some of the light and reflects the rest of the light as in a conventional vertical incident type focused-beam ellipsometer, the light is reflected to half of the object lens by a half-mirror and the light reflected from the half of the focus of the object lens is not transmitted through the beam splitter but is detected directly by a photodetector, and thus light interference due to the beam splitter is prevented and the light intensity is increased to maximally four times to thereby allow more accurate and precise measurement and analysis of physical properties for a sample of nanofilm or nano-pattern.

Abstract translation: 本发明涉及一种使用半反射镜的椭偏仪，更具体地说，涉及一种使用半透半反镜的椭偏仪，其中代替使用透射部分光并将其反射的矩形棱镜型或玻璃板式分束器 剩余的光如在传统的垂直入射型聚焦光束椭偏仪中那样，光被半透明反射到物镜的一半，并且从物镜的焦点的一半反射的光不透过 分光器，但是由光电检测器直接检测，因此防止了由于分束器引起的光干扰，并且将光强度增加到最大四倍，从而允许对纳米膜样品的物理性能的更准确和精确的测量和分析， 纳米图案。

公开(公告)号：WO2015030343A1

公开(公告)日：2015-03-05

申请号：PCT/KR2014/004267

申请日：2014-05-13

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： CHO, Yong Jai ,  CHEGAL, Won ,  CHO, Hyun Mo

IPC: G01N21/17

CPC classification number: G01N21/211 ,  G01J4/04 ,  G01N2021/213 ,  G01N2201/061 ,  G01N2201/0633 ,  G01N2201/0683 ,  G01N2201/11

Abstract: Provided is an optical element rotation type Mueller-matrix ellipsometer for solving a problem of measurement accuracy and measurement precision occurring due to residual polarization of a light source, polarization dependence of a photo-detector, measurement values of Fourier coefficients of a high order term in dual optical element rotation type Mueller-matrix ellipsometers according to the related art capable of measuring some or all of components of a Mueller-matrix for any sample.

Abstract translation: 提供一种光学元件旋转型米勒矩阵椭偏仪，用于解决由于光源的残余极化产生的测量精度和测量精度的问题，光检测器的偏振度依赖性，高阶项的傅里叶系数的测量值 根据相关技术的双光学元件旋转型米勒矩阵椭偏仪能够测量任何样品的Mueller矩阵的一些或全部组分。

公开(公告)号：WO2010062150A2

公开(公告)日：2010-06-03

申请号：PCT/KR2009/007084

申请日：2009-11-30

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  CHO, Hyun Mo ,  CHO, Yong Jai ,  CHEGAL, Won

Inventor： CHO, Hyun Mo ,  CHO, Yong Jai ,  CHEGAL, Won

IPC: G01N21/55 ,  G01N21/25 ,  G01N21/00

CPC classification number: G01N21/553 ,  G01N2021/212

Abstract: Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer, in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer so as to generate SPR according to an angle change of the polarized light; and a flow unit which supplies a buffer solution containing a bio material binding to or dissociation from the metal thin film generating surface plasmon, wherein the SPR and the ellipsometric phase change by change in an angle and a wavelength are simultaneously detected.

Abstract translation: 提供了一种使用光束轮廓椭圆光度法的多通道表面等离子体共振传感器; 更具体地涉及与使用多入射角度测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件耦合的高灵敏度测量技术。 多通道表面等离子体共振传感器包括垂直照明型聚焦光椭圆偏振仪，其中光被偏振; 表面等离子体共振（SPR）感测部分，其设置在聚焦光椭圆偏振仪的物镜部分处，以根据偏振光的角度变化产生SPR; 以及流动单元，所述流动单元供应包含与产生金属薄膜的表面等离子体激元结合或解离的生物材料的缓冲溶液，其中通过角度和波长的变化来同时检测SPR和椭偏相位。

公开(公告)号：WO2010062149A2

公开(公告)日：2010-06-03

申请号：PCT/KR2009/007083

申请日：2009-11-30

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  CHO, Hyun Mo ,  CHO, Yong Jai ,  CHEGAL, Won

Inventor： CHO, Hyun Mo ,  CHO, Yong Jai ,  CHEGAL, Won

IPC: G01N21/21 ,  G01N21/55

CPC classification number: G01N21/553 ,  G01N2021/212

Abstract: Provided is a multi-channel surface plasmon resonance sensor using beam profile ellipsometry; and, more particularly, to a high sensitive measuring technology, which is coupled with a vertical illumination type focused-beam ellipsometer using a multi-incident angle measurement method, and a surface plasmon resonance (SPR) sensing part deposited with a metal thin film. The multi-channel surface plasmon resonance sensor includes a vertical illumination type focused-beam ellipsometer in which light is polarized; a surface plasmon resonance (SPR) sensing part which is provided at the objective lens part of the focused-beam ellipsometer; and a multi-channel flow unit which supplies a buffer solution containing a bio material binding to or dissociation from a metal thin film generating surface plasmon.

Abstract translation: 提供了使用光束轮廓椭偏仪的多通道表面等离子体共振传感器; 更具体地说，涉及一种高灵敏度测量技术，其与使用多入射角测量方法的垂直照明型聚焦光束椭偏仪和沉积有金属薄膜的表面等离子体共振（SPR）感测部件相结合。 多通道表面等离子体共振传感器包括其中光被极化的垂直照明型聚焦光束椭偏仪; 设置在聚焦光束椭偏仪的物镜部分的表面等离子体共振（SPR）感测部分; 以及多通道流动单​​元，其提供包含与金属薄膜产生表面等离子体激元结合或解离的生物材料的缓冲溶液。

公开(公告)号：WO2009064103A1

公开(公告)日：2009-05-22

申请号：PCT/KR2008/006641

申请日：2008-11-11

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  CHO, Yong Jai ,  CHEGAL, Won ,  CHO, Hyun Mo

Inventor： CHO, Yong Jai ,  CHEGAL, Won ,  CHO, Hyun Mo

IPC: G01B11/06

CPC classification number: G01B11/06 ,  G01Q30/02

Abstract: The present invention relates to a minute measuring instrument for high speed and large area and a method thereof, and more particularly, to a minute measuring instrument for high speed and large area which measures properties of a specimen in high speed by a focused-beam ellipsometric part and then minutely remeasures the position showing a singular point by a minute measuring part and a method thereof.

Abstract translation: 本发明涉及一种高速大面积的微小测量仪器及其方法，更具体地说，涉及一种高速大面积的微小测量仪器，其通过聚焦光椭圆测量仪测量高速样品的性能 然后通过微小的测量部分及其方法精细地重新显示奇点的位置。

公开(公告)号：WO2009064102A1

公开(公告)日：2009-05-22

申请号：PCT/KR2008/006640

申请日：2008-11-11

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  CHO, Yong Jai ,  CHEGAL, Won ,  CHO, Hyun Mo

Inventor： CHO, Yong Jai ,  CHEGAL, Won ,  CHO, Hyun Mo

IPC: G01B11/06

CPC classification number: G01B11/0641 ,  G01N21/211 ,  G01N2021/213

Abstract: The present invention relates to a single-polarizer focused-beam ellipsometer, and more particularly, to a focused-beam ellipsometer having a simplified structure in which a single polarizing beam splitter plays roles as a polarization generator, a beam splitter and a polarization analyzer. A measuring method is employed in which a multiple incidence plane measurement method is applied to multiple angles of incidence, and thus it is possible to analyze exact information for optical properties of the specimen, i.e., in the case of a thin film, thickness and refractive index of the thin film.

Abstract translation: 本发明涉及单偏振器聚焦光束椭偏仪，更具体地说，涉及一种具有简化结构的聚焦光束椭偏仪，其中单个偏振分束器起到极化发生器，分束器和偏振分析器的作用。 采用将多重入射面测量方法应用于多个入射角的测量方法，因此可以分析样品的光学性质的精确信息，即在薄膜的情况下，厚度和折射率 薄膜指数。

公开(公告)号：WO2009064081A1

公开(公告)日：2009-05-22

申请号：PCT/KR2008/006268

申请日：2008-10-23

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  CHO, Yong Jai ,  CHEGAL, Won ,  CHO, Hyun Mo

Inventor： CHO, Yong Jai ,  CHEGAL, Won ,  CHO, Hyun Mo

IPC: G01B11/06

CPC classification number: G01B11/0641 ,  G01N21/211 ,  G01N21/8422

Abstract: The present invention relates to The present invention relates to an ellipsometer, and more particularly, to a linear focused-beam ellipsometer which linearly focuses a light on a specimen using a cylindrical optical system and then measures variation in polarization state of the reflected light. A light split by the beam splitting part is linearly focused onto a plurality of specimens and variation in polarization state of the reflected light is measured with respect to multiple angles of incidence. Therefore, it is possible to measure a plurality of specimens at the same time.

Abstract translation: 本发明涉及椭偏仪，更具体地说，涉及一种使用圆柱形光学系统将光直线聚焦在样本上的线性聚焦光束椭偏仪，然后测量反射光的偏振态的变化。 通过光束分离部分分割的光被线性地聚焦到多个样本上，并且相对于多个入射角度测量反射光的偏振状态的变化。 因此，可以同时测量多个试样。

公开(公告)号：WO2007148918A1

公开(公告)日：2007-12-27

申请号：PCT/KR2007/002992

申请日：2007-06-20

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  K-MAC ,  LEE, Joong Whan ,  KO, Young June ,  PARK, Young Sun ,  PARK, Yoon Jong ,  JEONG, Chi Woon ,  YE, Sang Heon ,  CHO, Yong Jai ,  CHO, Hyun Mo ,  CHEGAL, Won

Inventor： LEE, Joong Whan ,  KO, Young June ,  PARK, Young Sun ,  PARK, Yoon Jong ,  JEONG, Chi Woon ,  YE, Sang Heon ,  CHO, Yong Jai ,  CHO, Hyun Mo ,  CHEGAL, Won

IPC: G01N21/21

CPC classification number: G01N21/211

Abstract: The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.

Abstract translation: 本发明涉及一种椭偏仪，更具体地说，涉及通过分析具有特定偏振光然后在样品表面反射的光的偏振变化来找出样品的光学特性的椭偏仪。

公开(公告)号：EP3798608A1

公开(公告)日：2021-03-31

申请号：EP19833613.3

申请日：2019-07-03

Applicant: Korea Research Institute of Standards and Science

Inventor： CHO, Yong Jai ,  CHEGAL, Won ,  CHO, Hyun Mo

IPC: G01N21/21 ,  G01J4/00

Abstract: The present invention relates to a normal incidence ellipsometer and a method for measuring the optical properties of a sample by using same. The purpose of the present invention is to provide: a normal incidence ellipsometer in which a wavelength-dependent compensator is replaced with a wavelength-independent linear polarizer such that equipment calibration procedures are simplified while a measurement wavelength range expansion can be easily implemented; and a method for measuring the optical properties of a sample by using same.