公开(公告)号：US20190006144A1

公开(公告)日：2019-01-03

申请号：US16067564

申请日：2016-12-29

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Dal Hyun KIM ,  Byong Chon PARK ,  Chae Ho SHIN

IPC: H01J37/20 ,  H02N2/02 ,  H02N2/04

Abstract: Provided is a linear structure for displacement transmission having a structure that enables a desired movement to be performed smoothly while minimizing complexity of a system through a simple structure in performing a precise and fine movement, and a one-dimensional and three-dimensional micro movement device using the same.

公开(公告)号：US20170138983A1

公开(公告)日：2017-05-18

申请号：US15323078

申请日：2015-12-23

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Dal Hyun KIM ,  Byong Chon PARK ,  Chae Ho SHIN

IPC: G01Q60/32

CPC classification number: G01Q60/32 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q30/18 ,  G01Q60/38

Abstract: An object of the application is to provide a head-integrated for an atomic force microscope capable of realizing minimization of a weight and a volume and improvement of structural stability by optimizing a head structure of the atomic force microscope. Another object of the application is to provide a head-integrated atomic force microscope capable of being utilized for imaging a large-area sample by enabling high-rate head scan due to dynamic characteristics improved by mounting the integrated-head described above. Still another object of the application is to provide a composite microscope including a head-integrated atomic force microscope, capable of performing high-rate position search and imaging and performing precise observation of a three-dimensional shape up to an atomic image level in a region of interest by combining the head-integrated atomic force microscope having the improved dynamic characteristics as described above and an electron microscope or an optical microscope with each other.