公开(公告)号：US10191081B2

公开(公告)日：2019-01-29

申请号：US15238326

申请日：2016-08-16

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Byong Chon Park ,  DalHyun Kim ,  ChaeHo Shin

IPC: G01Q60/32 ,  G01Q10/06

Abstract: Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.