公开(公告)号：US20170052210A1

公开(公告)日：2017-02-23

申请号：US15238326

申请日：2016-08-16

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Byong Chon PARK ,  DalHyun KIM ,  ChaeHo SHIN

IPC: G01Q20/00

CPC classification number: G01Q60/32 ,  G01Q10/065

Abstract: Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.

Abstract translation: 本发明提供一种原子力显微镜的测定方法，该原子力显微镜使用探针对样品的表面进行扫描，以测量样品的表面性质，所述测量方法包括在使样品表面上的探针振动的同时检测探针的运动， 通过使用探针的运动的变化来获取样品上的表面信息，并且通过使用样品上的表面信息来控制探针。 样品上的表面信息可以包括表面的位置和斜率。 探针在样品表面上的振动可以包括通过探针围绕垂直于探针的扫描方向的轴线和样品的高度方向执行圆周运动。