公开(公告)号：US20160225600A1

公开(公告)日：2016-08-04

申请号：US14442283

申请日：2013-08-20

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Chang Joon PARK ,  Jong Rok AHN ,  Cheolsu HAN ,  Sang Jung AHN

IPC: H01J49/14 ,  H01J49/16 ,  H01J49/06

CPC classification number: H01J49/147 ,  H01J49/067 ,  H01J49/16

Abstract: According to one embodiment of the present invention, an ion source includes: an anode tube in which gas flowing in through one side is ionized and discharged to the other side and in which a slit is formed on the outer circumference thereof; a filament which emits thermal electrons toward the slit so as to ionize the gas; and a diffusion-preventing body arranged between the filament and the slit and having at least one hole through which the thermal electrons can pass so as to reduce the diffusion of the thermal electrons flowing into the anode tube.

Abstract translation: 根据本发明的一个实施例，离子源包括：阳极管，其中通过一侧流动的气体被离子化并排出到另一侧，并且在其外周上形成狭缝; 向狭缝发射热电子以使气体电离的灯丝; 以及布置在灯丝和狭缝之间并具有至少一个热电子可以通过的孔的扩散防止体，以减少流入阳极管的热电子的扩散。