公开(公告)号：WO2015037874A1

公开(公告)日：2015-03-19

申请号：PCT/KR2014/008351

申请日：2014-09-05

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： KIM, In-Seon

IPC: G01P15/00

CPC classification number: G01P15/105 ,  G01P15/11 ,  H01F6/04 ,  H01F6/06

Abstract: Provided are an acceleration measuring apparatus, a SQUID sensor module, and a fabrication method of the SQUID sensor module. The acceleration measuring apparatus includes a test mass structure with a superconducting thin film on its one surface and providing elasticity, a superconducting coil for measurement disposed on the substrate to be opposite to the one surface of the test mass structure and magnetically coupled to the test mass structure, a transformer disposed on the substrate and including a primary superconducting coil connected to the superconducting coil and a secondary superconducting coil magnetically coupled to the primary superconducting coil, an input coil disposed on the substrate and connected to the secondary superconducting coil, and a superconducting quantum interference device (SQUID) disposed on the substrate and magnetically coupled to the input coil.

Abstract translation: 提供了SQUID传感器模块的加速度测量装置，SQUID传感器模块和制造方法。 加速度测量装置包括在其一个表面上具有超导薄膜并提供弹性的测试质量结构，用于测量的超导线圈，设置在基板上以与测试质量结构的一个表面相对并且磁耦合到测试质量 结构，设置在所述衬底上并包括连接到所述超导线圈的初级超导线圈和磁耦合到所述初级超导线圈的次级超导线圈的变压器，设置在所述衬底上并连接到所述次级超导线圈的输入线圈，以及超导 量子干涉装置（SQUID），其设置在基板上并与输入线圈磁耦合。