公开(公告)号：US20220187195A1

公开(公告)日：2022-06-16

申请号：US17338539

申请日：2021-06-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Kyung Joong KIM ,  Gyea Young KWAK ,  Taegun KIM ,  Hyungung YU ,  Seung Mi LEE

IPC: G01N21/27

Abstract: Provided is a method of calibrating a nano measurement scale using a standard material including: measuring widths of a plurality of nanostructures included in the standard material and having pre-designated certified values of different sizes by a microscope; determining measured values for the widths of each of the plurality of nanostructures measured by the microscope based on a predetermined criterion; and calibrating a measurement scale of the microscope based on the certified values and the measured values.