公开(公告)号：US20220238735A1

公开(公告)日：2022-07-28

申请号：US17523650

申请日：2021-11-10

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Jiman CHOI ,  Yonuk CHONG ,  Gahyun CHOI ,  Kibog PARK

IPC: H01L31/0232 ,  H01L31/18 ,  H01L31/101 ,  H01B12/04

Abstract: A light detection device having improved self-alignment precision using a hard mask, and a method for manufacturing the same is provided. A method of manufacturing a light detection device includes i) providing a substrate; ii) providing a light reflecting portion on the substrate; iii) providing a light detection portion on the light reflection portion; iv) providing an anti-reflection portion provided on the light reflection portion to cover the light detection portion; v) removing each of the first outer periphery of the light reflection portion and the second outer periphery of the anti-reflection portion, and vi) providing a hard mask formed to correspond to the removed first outer periphery, positioned on the substrate, and spaced apart from the light reflecting portion to surround the light reflecting portion.