-
公开(公告)号:US20220100093A1
公开(公告)日:2022-03-31
申请号:US17485065
申请日:2021-09-24
Applicant: Khalifa University of Science and Technology
Inventor: Raquel FLORES , Ricardo JANEIRO , Jaime VIEGAS
IPC: G03F7/20 , H01L21/027 , H01L21/308 , H01L21/033 , H01L21/3065 , H01L21/311
Abstract: In this work is presented a method for fabrication of high-aspect ratio structures through spalling effect. The spalling is achieved through lithography, etching and sputtering processes, thus providing the flexibility to position the spalled structures according to the application requirements. This method has been successfully demonstrated for metal-oxides and metals. The width of the fabricated structures is dependent on the thickness of the film deposited by sputtering, where structures as small as 20 nm in width have been obtained.
-
公开(公告)号:US20210018431A1
公开(公告)日:2021-01-21
申请号:US17043368
申请日:2019-03-28
Applicant: Khalifa University of Science and Technology
Inventor: Jaime VIEGAS , Raquel FLORES , Ricardo JANEIRO
Abstract: A fiber-optic salinity and temperature measurement includes a first Fabry-Perot interferometer and a second Fabry-Perot interferometer. Each of the Fabry-Perot interferometers includes a first optical fiber fusion spliced to a second optical fiber such that a relatively large cavity is formed between the fibers. The relatively large cavity forms the measurement chamber for each Fabry-Perot interferometer. The input port on each of the Fabry-Perot interferometers is coupled to an optical splitter such that a single optical signal input is provided to each Fabry-Perot interferometer. The output port on each of the Fabry-Perot interferometers is coupled to an optical combiner that combines the interference signal received from each of the Fabry-Perot interferometers. An optical signal analyzer coupled to an output port of the optical combiner determines the salinity and temperature of a sample material in the large cavity of the second Fabry-Perot interferometer.
-