公开(公告)号：US20220252439A1

公开(公告)日：2022-08-11

申请号：US17591086

申请日：2022-02-02

Applicant: Kionix, Inc.

Inventor： Jonah DEWALL

IPC: G01D18/00 ,  G01R29/26 ,  H03F3/45 ,  H03H11/12

Abstract: A sensor apparatus includes a resonator, a transducer, a damping resistor, a first switch, a filter stage, a second switch, and a noise rejection stage. The transducer is configured to detect a position of the resonator. The damping resistor is configured to electrostatically actuate the transducer and convert a thermomechanical noise of the resonator to an electromechanical noise. The first switch is configured to receive a first signal from the transducer. The filter stage is configured to receive the first signal and adjust a phase and a gain of the first signal and output a filtered first signal. The second switch is configured to receive a second signal from the transducer. The noise rejection stage is configured to receive the filtered first signal and the second signal and reduce the filtered first signal from an output signal.

公开(公告)号：US20220252635A1

公开(公告)日：2022-08-11

申请号：US17591077

申请日：2022-02-02

Applicant: Kionix, Inc.

Inventor： Jonah DEWALL

IPC: G01P15/125 ,  G01P15/08 ,  G01P15/13

Abstract: A sensor apparatus includes a base, a tap, a channel, and a gate. The tap is adjacent the base and electrically coupled to the base. The channel is between the tap and the base. The gate is adjacent the channel and electrically coupled to the channel. The gate is separated from the channel by a gap. At least a portion of a charge flow in the channel is substantially parallel or antiparallel to an electric field between the gate and the channel. A triode capacitor system includes a channel region, a gate region, and a processor. The gate region is separated from the channel region by a gap. The processor is coupled to a base contact, a tap contact, and a gate contact and configured to measure a distance of the gap based on a potential difference between the base contact and the tap contact.