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公开(公告)号：EP3531105A1
公开(公告)日：2019-08-28
申请号：EP17865570.0
申请日：2017-10-24
Applicant: Korea Basic Science Institute
Inventor： LEE, Sang-Chul , JEONG, Jongman , KIM, Jin-Gyu , HAN, Cheolsu
Abstract: A sample stage according to one embodiment may comprise: a sample holder which accommodates a sample; and a first drive module, a second drive module, and a third drive module which are radially connected to the sample holder and allow the sample holder to have translational degree of freedom in three directions and rotational degree of freedom in at least two directions.
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