公开(公告)号：EP3816699A1

公开(公告)日：2021-05-05

申请号：EP20201230.8

申请日：2020-10-12

Applicant: Korea Optron Corp.

Inventor： KIM, Yun Goo ,  KIM, Hwan Sun ,  LEE, Eun Joong ,  KIM, Yong Kook

IPC: G02B26/08

Abstract: The present disclosure provides a vertically-shifting electrostatic actuator and an optical scanner employing the electrostatic actuator. The optical scanner of the present disclosure includes a mirror configured to reflect an incident light; and an electrostatic actuator configured to oscillate the mirror. According to an aspect of an exemplary embodiment, the electrostatic actuator includes a frame having an installation space in a central portion; and a drive electrode, a stationary electrode, a shifter, and a force application part installed in the installation space. Drive electrode fingers in the drive electrode and stationary electrode fingers in the stationary electrode are alternately disposed. The shifter may be connected either between the frame and the drive electrode or between the frame and the stationary electrode and vertically shifts either the drive electrode or the stationary electrode connected to the shifter when a vertical force is applied through the force application part.