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公开(公告)号：US20190355558A1
公开(公告)日：2019-11-21
申请号：US16461687
申请日：2018-01-02
Inventor： Hyo Chang LEE , Jung-Hyung KIM , Dae-Jin SEONG
IPC: H01J37/32
Abstract: A plasma generation apparatus includes a plasma generation unit. The plasma generation unit has a spherical or elliptical cavity. The plasma generation unit receives radio-frequency (RF) power in such a manner that bounce resonance of electrons is performed to generate plasma in the cavity. The cavity has a plasma extraction hole to communicate with an external space.
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