Abstract:
A gas permeability measurement apparatus and a gas permeability measurement method, including a first chamber filled with a measurement gas and maintained at a constant pressure, a second chamber connected in series to the first chamber, a third chamber connected in series to the second chamber, and a separating plate having a through-hole and separating the second chamber and the third chamber from each other. A conductance adjusting part is disposed between the second and third chambers to adjust conductance passing through the through-hole of the separating plate. A vacuum pump is connected to the third chamber to exhaust the third chamber. A differential pressure gauge measures differential pressure between the second and third chambers. A sample is disposed between the first and second chambers. The measurement gas is delivered to the second chamber after permeating the sample, and the conductance adjusting part sequentially provides at least two different conductances.