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公开(公告)号：DE10149357A1
公开(公告)日：2002-04-18
申请号：DE10149357
申请日：2001-10-06
Applicant: LEICA MICROSYSTEMS IMAGING SOL
Inventor： SIECKMANN FRANK
Abstract: The method involves acquiring object (1) images in different planes (2) in the z direction, each plane containing a number of coordinate points, associating each image to a plane with a define number (N), relating each plane to a common coordinate system origin and producing a mask image by comparing the contents of all images at each point to determine the plane using defined criteria, associating the plane number and storing in the mask image. Independent claims are also included for the following: a method of optical measurement of object surface profiles.
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