公开(公告)号：US20020146959A1

公开(公告)日：2002-10-10

申请号：US10114108

申请日：2002-04-03

Applicant: LG ELECTRONICS INC.

Inventor： Se Pyo Park ,  Nam Yeol Yang ,  Jae Ha Lim ,  Bok Yong Park

IPC: H01J009/26

CPC classification number: H01J9/261

Abstract: Disclosed is a plasma display panel, fabricating apparatus and method thereof enabling to reduce a process time for a PDP fabrication as well as prevent a degradation of a panel channel characteristic and panel damage. The present invention, which is carried out in a fabricating apparatus including first to third equipments built airtight in one body so as to carry out a passivation layer forming to an electric discharge gas injection/bonding therein, includes a passivation layer forming step of forming a MgO passivation layer on a first substrate in the first equipment, a cleaning step of transporting the first substrate having the MgO passivation layer and a second substrate to the second equipment, removing impurities existing on the first and second substrates by generating a plasma electric discharge between the first and second substrates using an electric discharge gas in the second equipment, and carrying out vacuum exhaust, and a bonding step of transporting the cleaned first and second substrates to the third equipment, coating a UV-hardening sealant on the first substrate, filing the third equipment with the electric discharge gas, attaching the first substrate closely to the second substrate, irradiating UV-rays on the sealant to be hardened so as to bond the first and second substrates to each other.

Abstract translation: 公开了一种能够减少PDP制造的处理时间以及防止面板通道特性和面板损坏的劣化的等离子体显示面板及其制造装置及其方法。 本发明在包括在一体内气密地构成的第一至第三设备的制造装置中进行，以便对其中的放电气体注入/接合进行钝化层的形成包括形成钝化层的钝化层形成步骤， MgO钝化层，在第一设备中的第一基板上的清洁步骤，将具有MgO钝化层的第一基板和第二基板输送到第二设备的清洁步骤，通过在第一和第二基板之间产生等离子体放电来除去存在于第一和第二基板上的杂质 所述第一和第二基板在所述第二设备中使用放电气体，并进行真空排气;以及粘合步骤，将清洁的第一和第二基板输送到所述第三设备，在所述第一基板上涂覆UV硬化密封剂， 具有放电气体的第三设备，将第一衬底紧密地附接到第二衬底 在要硬化的密封剂上照射紫外线以将第一和第二基板彼此粘合。