公开(公告)号：WO2012134082A3

公开(公告)日：2012-10-04

申请号：PCT/KR2012/001898

申请日：2012-03-16

Applicant: LG ELECTRONICS INC. ,  OH, Junggeun ,  LEE, Kwangho ,  LEE, Jangwoo ,  KIM, Jeonggyu ,  SHIN, Jinhyouk

Inventor： OH, Junggeun ,  LEE, Kwangho ,  LEE, Jangwoo ,  KIM, Jeonggyu ,  SHIN, Jinhyouk

IPC: C23C16/50 ,  C23C16/513 ,  C23C16/44

Abstract: There is disclosed a plasma enhanced chemical vapor deposition apparatus including a loading station to load an object on a pallet, an operation station to form a functional film by performing plasma reaction to the object loaded on the pallet, a unloading station to separate the object from the pallet, a circulation station to convey the pallet from the unloading station to the loading station, and a conveyer to convey the pallet to the stations sequentially to circulate the pallet.

公开(公告)号：WO2012134084A3

公开(公告)日：2012-10-04

申请号：PCT/KR2012/001911

申请日：2012-03-16

Applicant: LG ELECTRONICS INC. ,  OH, Junggeun ,  LEE, Kwangho ,  LEE, Jangwoo ,  KIM, Jeonggyu ,  SHIN, Jinhyouk

Inventor： OH, Junggeun ,  LEE, Kwangho ,  LEE, Jangwoo ,  KIM, Jeonggyu ,  SHIN, Jinhyouk

IPC: C23C16/50 ,  C23C16/513 ,  C23C16/44

Abstract: There is disclosed a plasma enhanced chemical vapor deposition apparatus including a pallet to load and convey an object thereon to provide a functional film to the object by plasma reaction, wherein the pallet includes a base, a jig to fix the object, and a fixing part disposed on the base at an upper side of the fixing part to fix the object to the pallet.

公开(公告)号：WO2012134083A2

公开(公告)日：2012-10-04

申请号：PCT/KR2012/001910

申请日：2012-03-16

Applicant: LG ELECTRONICS INC. ,  SHIN, Jinhyouk ,  KIM, Jeonggyu ,  LEE, Kwangho ,  LEE, Jangwoo ,  LEE, Moonkap ,  OH, Junggeun

Inventor： SHIN, Jinhyouk ,  KIM, Jeonggyu ,  LEE, Kwangho ,  LEE, Jangwoo ,  LEE, Moonkap ,  OH, Junggeun

IPC: C23C16/50 ,  C23C16/513 ,  C23C16/44

CPC classification number: C23C16/513 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C14/562 ,  C23C14/568 ,  C23C16/4485 ,  C23C16/45548 ,  C23C16/458 ,  C23C16/50 ,  C23C16/54 ,  H01J37/3244 ,  H01J37/32706 ,  H01J37/32715 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32862

Abstract: There is disclosed a plasma enhanced chemical vapor deposition apparatus including a chamber in which plasma reaction is performed to provide a functional film to an object received therein, a pallet mechanically and electrically connected with the object, a conveyer to convey the pallet to an inside from an outside of the chamber, and a power supplier to supply an electric power to the pallet, the power supplier comprising a moving contact distant from the pallet when the pallet is conveyed and contacting with the pallet when the pallet is stopped.

Abstract translation: 公开了一种等离子体增强化学气相沉积装置，其包括：腔室，其中执行等离子体反应以向其中容纳的物体提供功能膜，与物体机械和电连接的托盘，用于将托盘输送到内部的输送器 所述室的外部，以及向所述托盘供电的供电装置，所述供电装置包括当所述托盘被输送时远离所述托盘的移动触点，并且当所述托盘停止时与所述托盘接触。

公开(公告)号：EP2689049B1

公开(公告)日：2017-03-01

申请号：EP12765453.1

申请日：2012-03-16

Applicant: LG Electronics Inc.

Inventor： OH, Junggeun ,  LEE, Kwangho ,  LEE, Jangwoo ,  KIM, Jeonggyu ,  SHIN, Jinhyouk

IPC: C23C16/50 ,  C23C16/513 ,  C23C16/44 ,  C23C16/54 ,  H01J37/32 ,  C23C16/02 ,  C23C16/458

CPC classification number: C23C16/0236 ,  C23C16/4587 ,  C23C16/50 ,  C23C16/54 ,  H01J37/32715

公开(公告)号：EP2689048A2

公开(公告)日：2014-01-29

申请号：EP12763606.6

申请日：2012-03-16

Applicant: LG Electronics Inc.

Inventor： SHIN, Jinhyouk ,  KIM, Jeonggyu ,  LEE, Kwangho ,  LEE, Jangwoo ,  LEE, Moonkap ,  OH, Junggeun

IPC: C23C16/50 ,  C23C16/513 ,  C23C16/44

CPC classification number: C23C16/513 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  C23C14/562 ,  C23C14/568 ,  C23C16/4485 ,  C23C16/45548 ,  C23C16/458 ,  C23C16/50 ,  C23C16/54 ,  H01J37/3244 ,  H01J37/32706 ,  H01J37/32715 ,  H01J37/32743 ,  H01J37/32788 ,  H01J37/32862

Abstract: There is disclosed a plasma enhanced chemical vapor deposition apparatus including a chamber in which plasma reaction is performed to provide a functional film to an object received therein, a pallet mechanically and electrically connected with the object, a conveyer to convey the pallet to an inside from an outside of the chamber, and a power supplier to supply an electric power to the pallet, the power supplier comprising a moving contact distant from the pallet when the pallet is conveyed and contacting with the pallet when the pallet is stopped.

Abstract translation: 公开了一种等离子体增强化学气相沉积设备，其包括：腔室，在腔室中进行等离子体反应以向其中容纳的物体提供功能膜;托盘，与物体机械和电连接;传送器，将托盘传送到内部 所述腔室的外部以及向所述货盘供应电力的电力供应器，所述电力供应器包括当所述货盘被传送时远离所述货盘的移动触点并且在所述货盘停止时与所述货盘接触。

公开(公告)号：EP2689050A2

公开(公告)日：2014-01-29

申请号：EP12765504.1

申请日：2012-03-16

Applicant: LG Electronics Inc.

Inventor： OH, Junggeun ,  LEE, Kwangho ,  LEE, Jangwoo ,  KIM, Jeonggyu ,  SHIN, Jinhyouk

IPC: C23C16/50 ,  C23C16/513 ,  C23C16/44

CPC classification number: C23C16/54 ,  C23C16/458 ,  C23C16/50 ,  C23C16/505 ,  C23C16/509

Abstract: There is disclosed a plasma enhanced chemical vapor deposition apparatus including a loading station to load an object on a pallet, an operation station to form a functional film by performing plasma reaction to the object loaded on the pallet, a unloading station to separate the object from the pallet, a circulation station to convey the pallet from the unloading station to the loading station, and a conveyer to convey the pallet to the stations sequentially to circulate the pallet.

Abstract translation: 本发明公开了一种等离子体增强化学气相沉积设备，其包括用于将物体装载到托盘上的装载站，通过对装载在托盘上的物体执行等离子体反应来形成功能膜的操作站，用于将物体与托盘分离的卸载站 托盘，将托盘从卸载站传送到装载站的循环站，以及将托盘依次传送到站以使托盘循环的传送器。

公开(公告)号：EP2689049A2

公开(公告)日：2014-01-29

申请号：EP12765453.1

申请日：2012-03-16

Applicant: LG Electronics Inc.

Inventor： OH, Junggeun ,  LEE, Kwangho ,  LEE, Jangwoo ,  KIM, Jeonggyu ,  SHIN, Jinhyouk

IPC: C23C16/50 ,  C23C16/513 ,  C23C16/44

CPC classification number: C23C16/0236 ,  C23C16/4587 ,  C23C16/50 ,  C23C16/54 ,  H01J37/32715

Abstract: There is disclosed a plasma enhanced chemical vapor deposition apparatus including a pallet to load and convey an object thereon to provide a functional film to the object by plasma reaction, wherein the pallet includes a base, a jig to fix the object, and a fixing part disposed on the base at an upper side of the fixing part to fix the object to the pallet.