公开(公告)号：KR20070097734A

公开(公告)日：2007-10-05

申请号：KR20060028365

申请日：2006-03-29

Applicant: LG PHILIPS LCD CO LTD

Inventor： JEON YEONG HA

IPC: H01L21/027

CPC classification number: G03F7/70191 ,  G03F7/70091 ,  G03F7/70891 ,  G03F7/70908

Abstract: An illuminating optic system is provided to prevent a lens and a mirror from being contaminated and to improve a light transmittance by forming an exhaust tube for exhausting a contaminated gas. A first and second airtight chambers(310,320) are separated from each other. A first and second air absorbing tubes(330a,330b) are installed in the first and second airtight chambers, respectively in order to inject an inert gas into the first and second airtight chambers. A first exhaust tube(340a) is installed in the first airtight chamber in order to exhaust a contaminated gas. A backward flow prevention unit(350) is installed at an inlet of the first exhaust tube in order to prevent a backward flow of external air. An exhaust pump(400) is connected to the first exhaust tube.

Abstract translation: 提供照明光学系统以防止透镜和反射镜被污染，并且通过形成用于排出污染气体的排气管来提高透光率。 第一和第二气密室（310,320）彼此分离。 第一和第二空气吸收管（330a，330b）分别安装在第一和第二气密室中，以便将惰性气体注入第一和第二气密室。 第一排气管（340a）安装在第一气密室中以排出受污染的气体。 为了防止外部空气的反向流动，在第一排气管的入口处设置有逆流防止单元（350）。 排气泵（400）连接到第一排气管。