公开(公告)号：US20040261715A1

公开(公告)日：2004-12-30

申请号：US10872306

申请日：2004-06-18

Applicant: LG PHILIPS LCD CO., LTD.

Inventor： Kwang Jong Yoo

IPC: C23C016/00

CPC classification number: H01J37/32082 ,  H01J37/32577 ,  H01J37/32724

Abstract: A display device fabricating apparatus includes a radio frequency generator and a vacuum chamber. A first electrode and a second electrode that receive power from the radio frequency generator form a plasma using a gas inside the vacuum chamber. A power supply line supplies power to the first electrode from the radio frequency generator. A refrigerating part uses a refrigerant other than air in order to remove the heat generated from the power supply line. The refrigerant is circulated through a system that cools the refrigerant below the ambient external temperature before the refrigerant is used to cool the power supply line and re-cool or re-liquefy the refrigerant that has been heated by the power supply line.

Abstract translation: 显示装置制造装置包括射频发生器和真空室。 从射频发生器接收电力的第一电极和第二电极使用真空室内的气体形成等离子体。 电源线从射频发生器向第一电极供电。 制冷部件使用空气以外的制冷剂，以去除从电源线产生的热量。 在制冷剂用于冷却电源线之前，制冷剂循环通过冷却制冷剂低于环境外部温度的系统，并且重新冷却或重新液化由供电线加热的制冷剂。