Method of forming multi-domain alignment layer
    1.
    发明申请
    Method of forming multi-domain alignment layer 有权
    形成多畴取向层的方法

    公开(公告)号:US20040227883A1

    公开(公告)日:2004-11-18

    申请号:US10842878

    申请日:2004-05-10

    CPC classification number: G02F1/13378 G02F1/133753

    Abstract: A method of forming an alignment layer with a multi-domain is provided. The alignment layer is formed on a substrate. A mask having a transmission part and a shielding part is aligned over the substrate. First and second alignment directions in the alignment layer are formed by irradiating an ion beam onto the substrate at different irradiation angles. Using the aforementioned ion-beam irradiation process eliminates the need for multiple rubbing processes to create the multi-domain alignment layer.

    Abstract translation: 提供了一种形成具有多畴的取向层的方法。 取向层形成在基板上。 具有透射部分和屏蔽部分的掩模在衬底上对准。 通过以不同的照射角度将离子束照射到基板上来形成取向层中的第一和第二取向方向。 使用上述离子束照射工艺消除了多次摩擦处理以产生多畴取向层的需要。

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