公开(公告)号：US20030156271A1

公开(公告)日：2003-08-21

申请号：US10245498

申请日：2002-09-18

Applicant: LG. Philips LCD Co., Ltd.

Inventor： Yong Sang Byun ,  Moo Yeol Park ,  Sung Su Jung

IPC: G03B027/62

CPC classification number: H01L21/682 ,  G03F1/66 ,  G03F7/2014

Abstract: A mask holder for irradiating UV-rays is disclosed in the present invention. The mask holder includes a lower part having a frame and a mask supporting member supporting a mask, wherein the mask supporting member is in the frame and has a plurality of first connecting portions, and an upper part having a plurality of second connecting portions to be aligned with the first connecting portions.

Abstract translation: 在本发明中公开了用于照射紫外线的掩模支架。 掩模保持器包括具有框架的下部和支撑掩模的掩模支撑部件，其中，所述掩模支撑部件位于所述框架中，并且具有多个第一连接部，所述上部具有多个第二连接部， 与第一连接部对准。