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公开(公告)号：JPH10253900A
公开(公告)日：1998-09-25
申请号：JP4065698
申请日：1998-02-23
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S
Abstract: PROBLEM TO BE SOLVED: To attain a 'clean' square wave response by pressurizing a structure body higher than atmospheric pressure, and arranging the sufficient number of holes in a movable member having holes for a gas flow. SOLUTION: This structure body is composed of a movable member 15 which moves at speed not less than about one mega hertz and has plural holes 14, an airtight seal 33 to seal the movable member 15 and gas in the airtight seal 33, and environmental pressure in the airtight seal 33 is set higher than atmospheric pressure. The hole 14 is arranged so as to start from the outside of an area 16 which forms an 'optical window' and is positioned in the center. This structure body 1 has minimum porosity 1/(ωo τ) like about 1.4 and minimum reduced pressure (a gas frequency) ωg /ωo like about 1.25. High speed operation of such a device in 'ringing' not more than about 10 percent, requires [ωg /ωo >1.25, and 0.25+0.7(ωg /ωo ) -0.8(ωg /ωo -1.25) +(ωg /ωo -1.25)].
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公开(公告)号：JP2001133706A
公开(公告)日：2001-05-18
申请号：JP2000304528
申请日：2000-10-04
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S
Abstract: PROBLEM TO BE SOLVED: To provide an optical attenuator of a novel structure. SOLUTION: This optical attenuator has a film covering a cavity formed in a substrate. The film attenuates an optical signal made incident on the bottom surface of the cavity constituting a deformable mirror by the movement of the film relative to the bottom surface. The movement of the film is executed by controlling the angle of the incident optical signal from the surface of the film.
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公开(公告)号：JP2001296483A
公开(公告)日：2001-10-26
申请号：JP2001083938
申请日：2001-03-23
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S
Abstract: PROBLEM TO BE SOLVED: To provide an article consisting of an optical hollow having a micron size suitable for making an optical interface effect. SOLUTION: The article consisting of an optical hollow includes two mirrors placed parallel to each other at an interval, and at least one mirror is preferably movable. In some embodiments, both mirrors are formed of single crystal silicon to which stress is not applied. The single crystal silicon to be used in some embodiments is supplied preferably from a single crystal silicon (SOI) wafer on an insulating material. A first mirror is patterned on the thin silicon layer of a first SOI wafer. A pillar is placed on the thin silicon layer near the first mirror. The thin silicon layer of a second SOI wafer is attached to the pillar so that a gap exists between the thin silicon layers keeping two intervals. The thin silicon layer of the second SOI wafer is released by removing the thick silicon layer and an embedded oxide from the wafer, and thus forms a movable mirror.
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公开(公告)号：JPH1054948A
公开(公告)日：1998-02-24
申请号：JP12199697
申请日：1997-05-13
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S
Abstract: PROBLEM TO BE SOLVED: To unnecessitate a high working voltage, to reduce restriction on the material of a supporting member for reflection zone plate and to reduce restriction on the selection of the material of a device and manufacturing process. SOLUTION: A reflected light signal 24 from a reflection zone plate 8, by which an incident light signal 23 is reflected, is focused on a light receiving waveguide member (not shown in the figure) by means of the reflection zone plate 8 defined in a zone plate supporting member 6b capable of displacement in a light modulating device/ changeover device. A controlled voltage source 18b supplies a voltage to the zone plate supporting member 6b and a layer 2b separated from the zone plate supporting member 6b apart according to a control signal. The supplied voltage generates electrostatic force for displacing the zone plate supporting member 6b toward the layer 2b. When the zone plate supporting member 6b is displaced, the orientation of the reflection zone plate 8 to the incident light signal 23 is changed. The orientation change changes the direction of path of the reflected light signal 24 from the reflection zone plate 8. By changing the amplitude of a supplied voltage, the reflected light signal 24 is turned to the direction of another light receiving waveguide member (not shown in the figure).
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公开(公告)号：DE602005001745D1
公开(公告)日：2007-09-06
申请号：DE602005001745
申请日：2005-09-22
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S , MAROM DAN MARK
Abstract: A MEMS device fabricated from a single multi-layered wafer, which alleviates the alignment problem associated with a two-piece prior-art design. In one embodiment, the MEMS device has a stationary part and a movable part rotatably coupled to the stationary part. The stationary part has an electrode and a first conducting structure electrically isolated from the electrode. The movable part has a rotatable plate and a second conducting structure located on the plate and electrically connected to the plate. The mass and location of the second conducting structure are selected such as to compensate for the plate's imbalance with respect to the rotation axis. In addition, at the rest position, the first and second conducting structures form, around the electrode, a substantially continuous barrier adapted to provide electrical shielding for the electrode. The movable part is adapted to rotate with respect to the stationary part in response to a voltage applied between the second conducting structure and the electrode such that the movable part cannot come into physical contact with the electrode during the rotation, which alleviates the snap-down problem inherent to many prior-art devices.
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Patent Agency Ranking
公开(公告)号：DE602005001745T2
公开(公告)日：2008-04-30
申请号：DE602005001745
申请日：2005-09-22
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S , MAROM DAN MARK
Abstract: A MEMS device fabricated from a single multi-layered wafer, which alleviates the alignment problem associated with a two-piece prior-art design. In one embodiment, the MEMS device has a stationary part and a movable part rotatably coupled to the stationary part. The stationary part has an electrode and a first conducting structure electrically isolated from the electrode. The movable part has a rotatable plate and a second conducting structure located on the plate and electrically connected to the plate. The mass and location of the second conducting structure are selected such as to compensate for the plate's imbalance with respect to the rotation axis. In addition, at the rest position, the first and second conducting structures form, around the electrode, a substantially continuous barrier adapted to provide electrical shielding for the electrode. The movable part is adapted to rotate with respect to the stationary part in response to a voltage applied between the second conducting structure and the electrode such that the movable part cannot come into physical contact with the electrode during the rotation, which alleviates the snap-down problem inherent to many prior-art devices.
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公开(公告)号：DE69737921D1
公开(公告)日：2007-08-30
申请号：DE69737921
申请日：1997-05-06
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S
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公开(公告)号：DE602005002277T2
公开(公告)日：2008-05-29
申请号：DE602005002277
申请日：2005-01-07
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S
IPC: F42C15/00 , F42C15/24 , B81B3/00 , B81B7/02 , B81C1/00 , F42C15/34 , F42C15/40 , H01H1/00 , H01H35/14 , H01H59/00 , H01L27/06
Abstract: A micro-electrical-mechanical-switch (MEMS) device (100) comprises a semiconductor wafer (301), a first semiconductor layer (302) formed on the semiconductor wafer (301), and a second semiconductor layer (303) formed on the first layer (302). A first latching movable shuttle (A,103) is formed in the second layer (303) and has the first layer (302) removed under the first movable shuttle (A,103), the first movable shuttle (A,103) being moved in a first direction (150) relative to the wafer (301) in response to a predetermined acceleration of the MEMS device (100) in a direction (151) opposite to the first direction (150) thereby changing an operating condition of the MEMS device (100) from a first switch state to an intermediate switch state. A second latching moveable shuttle (B,105) is formed within the first shuttle (A,103), the second shuttle (B,105) being moved in a second direction (152) relative to the first shuttle (A,103) in response to a thermally activated force so as to change the operating state of the MEMS device (100) from the intermediate switch state to a second switch state. In the second switch state an opening (109) in the second latching moveable shuttle (B,105) aligns with an opening in the wafer (301) to enable an optical signal to pass through the aligned openings. In a second embodiment, a MEMS device (700) comprises only one movable shuttle switch (703) formed in the second layer (303), the shuttle switch (703) being operated in response to a predetermined acceleration of the MEMS device (700).
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公开(公告)号：DE602005001161T2
公开(公告)日：2008-01-24
申请号：DE602005001161
申请日：2005-02-15
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S , YURKE BERNARD
Abstract: Carbon particles, such as, carbon fibrils and carbon nanotube molecules, may be assembled into substantially pure aligned fibers by a) dispersing the carbon particles within a curable liquid, b) aligning the carbon particles by flowing the mixture of curable liquid and carbon particles down a tapering tube, and c) curing the flowing mixture of curable liquid and carbon particles in the general vicinity of the end of the tapering tube to form a fiber. The curable liquid may be cured using ultraviolet light. The solidified mixture may be further processed by d) heating the fiber so as to cause the volatile elements of the solidified curable liquid portion to substantially dissipate from the fiber, e) twisting the fiber to increase its density, f) heating the fiber to sinter the carbon particles within the fiber, and g) cladding the fiber. The resulting fiber may then be spooled onto a take-up drum.
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公开(公告)号：DE69737921T2
公开(公告)日：2008-04-17
申请号：DE69737921
申请日：1997-05-06
Applicant: LUCENT TECHNOLOGIES INC
Inventor： GREYWALL DENNIS S
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