METHOD AND DEVICE FOR COMPENSATING ACTIVE TEMPERATURE NUMERICAL VALUE OF ETALON IN WAVELENGTH STABILIZATION LASER

    公开(公告)号:JP2001044558A

    公开(公告)日:2001-02-16

    申请号:JP2000212091

    申请日:2000-07-13

    Abstract: PROBLEM TO BE SOLVED: To stabilize and lock absolute wavelength of laser beams by a method, wherein a temperature change of an etalon optical filter is compensated actively. SOLUTION: A temperature of an etalon filter 30 is monitored by a thermistor 32, and a controller 40 monitors the etalon 30 and a laser chip 12 by use of an etalon path signal, reference path signal and a temperature measured by the thermistor 32. Thus, a temperature of the etalon is monitored, and a value of grid-offset is adjusted, based on a temperature change of the etalon. Here, the laser system 10 uses a value obtained in the grid-offset in calculation of a difference for use in controlling a TEC 52, and can compensate effectively a change of etalon reaction generated from the temperature change of the etalon. By compensating for the temperature change of the etalon, the laser system 10 can lock effectively to the absolute wavelength of a laser beam.

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