公开(公告)号：JPH1056232A

公开(公告)日：1998-02-24

申请号：JP11896497

申请日：1997-05-09

Applicant: LUCENT TECHNOLOGIES INC

Inventor： CHAKRABARTI UTPAL KUMAR ,  CHEN PAUL SANGONE ,  PRZYBYLEK GEORGE JOHN ,  RINAUDO DOMINIC PAUL

IPC: H01S5/00 ,  C23C14/50 ,  H01S5/028 ,  H01S3/18

Abstract: PROBLEM TO BE SOLVED: To realize more uniform coating of material by securing a parallel hexagonal device to a holder on a pair of device holding surfaces, setting the holder in a vacuum chamber and realizing a surface coating environment in the vacuum chamber thereby holding a laser bar in a small region. SOLUTION: When meshed thin plates 50 (50-1, 50-2,..., 50-n) are fully opened, a laser bar 90 is set on a laser bar holding surface such that a first pair of facing major surfaces 96, 98 abut on the laser bar holding surface. When a cross member 32 is pulled toward a second end 38 by the tensile force of a spring 34 and fastened thereto, the surfaces 100, 102 of the laser bar 90 are flush with each major surface of a securing unit 20 and exposed to coating process while being secured. A plurality of carrier frames loaded with the securing unit 20 are arranged in the vacuum chamber of a CVD system. Each carrier frame turns to pass the container of coating material and the major surfaces 100, 102 facing the steam through the steam.